Analysis of defects in GaAsN grown by chemical beam epitaxy on high index GaAs substrates
Abstract
The lattice defects in GaAsN grown by chemical beam epitaxy on GaAs 311B and GaAs 10A toward [110] were characterized and discussed by using deep level transient spectroscopy (DLTS) and on the basis of temperature dependence of the junction capacitances (C{sub J}). In one hand, GaAsN films grown on GaAs 311B and GaAs 10A showed n-type and p-type conductivities, respectively although the similar and simultaneous growth conditions. This result is indeed in contrast to the common known effect of N concentration on the type of conductivity, since the surface 311B showed a significant improvement in the incorporation of N. Furthermore, the temperature dependence of C{sub J} has shown that GaAs 311B limits the formation of N-H defects. In the other hand, the energy states in the forbidden gap of GaAsN were obtained. Six electron traps, E1 to E6, were observed in the DLTS spectrum of GaAsN grown on GaAs 311B, with apparent activation energies of 0.02, 0.14, 0.16, 0.33, 0.48, and 0.74 eV below the bottom edge of the conduction band, respectively. In addition, four hole traps, H1 to H4, were observed in the DLTS spectrum of GaAsN grown on GaAs 10A, with energy depths of 0.13, 0.20, 0.39, andmore »
- Authors:
-
- Toyota Technological Institute, Nagoya (Japan)
- Publication Date:
- OSTI Identifier:
- 22217955
- Resource Type:
- Journal Article
- Journal Name:
- AIP Conference Proceedings
- Additional Journal Information:
- Journal Volume: 1556; Journal Issue: 1; Conference: CPV-9: 9. international conference on concentrator photovoltaic systems, Miyazaki (Japan), 15-17 Apr 2013; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; ACTIVATION ENERGY; CAPACITANCE; CONCENTRATION RATIO; CRYSTAL DEFECTS; DEEP LEVEL TRANSIENT SPECTROSCOPY; ELECTRONS; EPITAXY; EV RANGE; GALLIUM ARSENIDES; GALLIUM NITRIDES; HOLES; MORPHOLOGY; SEMICONDUCTOR JUNCTIONS; SUBSTRATES; SURFACES; TEMPERATURE DEPENDENCE; THIN FILMS; TRAPS; VALENCE
Citation Formats
Bouzazi, Boussairi, Kojima, Nobuaki, Ohshita, Yoshio, and Yamaguchi, Masafumi. Analysis of defects in GaAsN grown by chemical beam epitaxy on high index GaAs substrates. United States: N. p., 2013.
Web. doi:10.1063/1.4822192.
Bouzazi, Boussairi, Kojima, Nobuaki, Ohshita, Yoshio, & Yamaguchi, Masafumi. Analysis of defects in GaAsN grown by chemical beam epitaxy on high index GaAs substrates. United States. https://doi.org/10.1063/1.4822192
Bouzazi, Boussairi, Kojima, Nobuaki, Ohshita, Yoshio, and Yamaguchi, Masafumi. 2013.
"Analysis of defects in GaAsN grown by chemical beam epitaxy on high index GaAs substrates". United States. https://doi.org/10.1063/1.4822192.
@article{osti_22217955,
title = {Analysis of defects in GaAsN grown by chemical beam epitaxy on high index GaAs substrates},
author = {Bouzazi, Boussairi and Kojima, Nobuaki and Ohshita, Yoshio and Yamaguchi, Masafumi},
abstractNote = {The lattice defects in GaAsN grown by chemical beam epitaxy on GaAs 311B and GaAs 10A toward [110] were characterized and discussed by using deep level transient spectroscopy (DLTS) and on the basis of temperature dependence of the junction capacitances (C{sub J}). In one hand, GaAsN films grown on GaAs 311B and GaAs 10A showed n-type and p-type conductivities, respectively although the similar and simultaneous growth conditions. This result is indeed in contrast to the common known effect of N concentration on the type of conductivity, since the surface 311B showed a significant improvement in the incorporation of N. Furthermore, the temperature dependence of C{sub J} has shown that GaAs 311B limits the formation of N-H defects. In the other hand, the energy states in the forbidden gap of GaAsN were obtained. Six electron traps, E1 to E6, were observed in the DLTS spectrum of GaAsN grown on GaAs 311B, with apparent activation energies of 0.02, 0.14, 0.16, 0.33, 0.48, and 0.74 eV below the bottom edge of the conduction band, respectively. In addition, four hole traps, H1 to H4, were observed in the DLTS spectrum of GaAsN grown on GaAs 10A, with energy depths of 0.13, 0.20, 0.39, and 0.52 eV above the valence band maximum of the alloy, respectively. Hence, the surface morphology of the GaAs substrate was found to play a key factor role in clarifying the electrical properties of GaAsN grown by CBE.},
doi = {10.1063/1.4822192},
url = {https://www.osti.gov/biblio/22217955},
journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1556,
place = {United States},
year = {Fri Sep 27 00:00:00 EDT 2013},
month = {Fri Sep 27 00:00:00 EDT 2013}
}