Elastic properties of B-C-N films grown by N{sub 2}-reactive sputtering from boron carbide targets

Journal Article · Sat Dec 07 00:00:00 EST 2013 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4837655· OSTI ID:22217823

Salas, E.; Jiménez Riobóo, R. J.; Jiménez-Villacorta, F.; Prieto, C. ^[1]; Sánchez-Marcos, J. ^[1]; Muñoz-Martín, A.; Prieto, J. E.; Joco, V. ^[2]

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1. Instituto de Ciencia de Materiales de Madrid, Consejo Superior de Investigaciones Científicas, Cantoblanco, 28049 Madrid (Spain)
2. Centro de Microanálisis de Materiales, Universidad Autónoma de Madrid, Cantoblanco, 28049 Madrid (Spain)

Boron-carbon-nitrogen films were grown by RF reactive sputtering from a B{sub 4}C target and N{sub 2} as reactive gas. The films present phase segregation and are mechanically softer than boron carbide films (a factor of more than 2 in Young's modulus). This fact can turn out as an advantage in order to select buffer layers to better anchor boron carbide films on substrates eliminating thermally induced mechanical tensions.

• OSTI ID: 22217823
• Journal Information: Journal of Applied Physics, Vol. 114, Issue 21; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BORON
BORON CARBIDES
CARBON
DEPOSITION
ELASTICITY
LAYERS
NITROGEN
SEGREGATION
SPUTTERING
SUBSTRATES
THIN FILMS
YOUNG MODULUS