The influence of surface properties on the plasma dynamics in radio-frequency driven oxygen plasmas: Measurements and simulations

Journal Article · Mon Dec 09 00:00:00 EST 2013 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4841675· OSTI ID:22217759

Greb, Arthur; Niemi, Kari; O'Connell, Deborah; Gans, Timo ^[1]

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1. York Plasma Institute, Department of Physics, University of York, York, YO10 5DD (United Kingdom)

Plasma parameters and dynamics in capacitively coupled oxygen plasmas are investigated for different surface conditions. Metastable species concentration, electronegativity, spatial distribution of particle densities as well as the ionization dynamics are significantly influenced by the surface loss probability of metastable singlet delta oxygen (SDO). Simulated surface conditions are compared to experiments in the plasma-surface interface region using phase resolved optical emission spectroscopy. It is demonstrated how in-situ measurements of excitation features can be used to determine SDO surface loss probabilities for different surface materials.

• OSTI ID: 22217759
• Journal Information: Applied Physics Letters, Vol. 103, Issue 24; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
COMPARATIVE EVALUATIONS
DENSITY
ELECTRONEGATIVITY
EMISSION SPECTROSCOPY
EXCITATION
EXCITED STATES
HIGH-FREQUENCY DISCHARGES
INTERFACES
IONIZATION
OXYGEN
PLASMA DENSITY
PLASMA DIAGNOSTICS
RADIOWAVE RADIATION
SIMULATION
SPATIAL DISTRIBUTION
SURFACE PROPERTIES
SURFACES