Nanotube array controlled carbon plasma deposition

Journal Article · Mon Jun 17 00:00:00 EDT 2013 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4811747· OSTI ID:22163043

Qian, Shi; Cao, Huiliang; Liu, Xuanyong; Ding, Chuanxian ^[1]

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1. State Key Laboratory of High Performance Ceramics and Superfine Microstructures, Shanghai Institute of Ceramics, Chinese Academy of Sciences, 1295 Dingxi Road, Shanghai 200050 (China)

Finding approaches to control the elementary processes of plasma-solid interactions and direct the fluxes of matter at nano-scales becomes an important aspect in science. This letter reports that, by taking advantages of the spacing characteristics of discrete TiO{sub 2} nanotube arrays, the flying trajectories and the subsequent implantation and deposition manner of energetic carbon ions can be directed and controlled to fabricate hollow conical arrays. The study provides an alternative method for plasma nano-manufacturing.

• OSTI ID: 22163043
• Journal Information: Applied Physics Letters, Vol. 102, Issue 24; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY
CARBON
CARBON IONS
DEPOSITION
FABRICATION
INTERACTIONS
MANUFACTURING
NANOTUBES
PLASMA
SOLIDS
TITANIUM OXIDES