Laser triggered Z-pinch broadband extreme ultraviolet source for metrology

Journal Article · Mon May 20 00:00:00 EDT 2013 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4807172· OSTI ID:22162949

Tobin, I.; Lunney, J. G. ^[1]; Juschkin, L. ^[2]; Sidelnikov, Y. ^[3]; O'Reilly, F.; Sokell, E. ^[2]; Sheridan, P. ^[4]

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1. School of Physics, Trinity College Dublin, Dublin 2 (Ireland)
2. School of Physics, University College Dublin, Belfield, Dublin 4 (Ireland)
3. ISAN Institute of Spectroscopy, Fizicheskaya Str. 5, Troitsk, Moscow Region 142190 (Russian Federation)
4. Newlambda Technologies, UCD Science Centre North, Belfield, Dublin 4 (Ireland)

We compare the extreme ultraviolet emission characteristics of tin and galinstan (atomic %: Ga: 78.35, In: 14.93, Sn: 6.72) between 10 nm and 18 nm in a laser-triggered discharge between liquid metal-coated electrodes. Over this wavelength range, the energy conversion efficiency for galinstan is approximately half that of tin, but the spectrum is less strongly peaked in the 13-15 nm region. The extreme ultraviolet source dimensions were 110 {+-} 25 {mu}m diameter and 500 {+-} 125 {mu}m length. The flatter spectrum, and -19 Degree-Sign C melting point, makes this galinstan discharge a relatively simple high radiance extreme ultraviolet light source for metrology and scientific applications.

• OSTI ID: 22162949
• Journal Information: Applied Physics Letters, Vol. 102, Issue 20; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
APPROXIMATIONS
COMPARATIVE EVALUATIONS
DIRECT ENERGY CONVERSION
EFFICIENCY
ELECTRIC DISCHARGES
EMISSION
ENERGY CONSERVATION
EXTREME ULTRAVIOLET RADIATION
GALLIUM COMPOUNDS
INDIUM COMPOUNDS
LASER RADIATION
LIGHT SOURCES
LIGHT TRANSMISSION
LIQUID METALS
MELTING POINTS
SPECTRA
TERNARY ALLOY SYSTEMS
TIN
TIN COMPOUNDS