Vacuum ultraviolet emission from microwave Ar-H{sub 2} plasmas

Journal Article · Mon Mar 18 00:00:00 EDT 2013 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4796134· OSTI ID:22162805

Espinho, S.; Felizardo, E.; Tatarova, E.; Dias, F. M.; Ferreira, C. M. ^[1]

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1. Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade Tecnica de Lisboa, 1049-001 Lisboa (Portugal)

Vacuum ultraviolet emission from Ar-H{sub 2} wave driven microwave (2.45 GHz) plasmas operating at low pressures (0.1-1 mbar) has been investigated. The emitted spectra show the presence of the Ar resonance lines at 104.8 and 106.7 nm and of the Lyman-{alpha},{beta} atomic lines at 121.6 nm and 102.6 nm, respectively. The increase of the hydrogen amount in the mixture results in an abrupt increase of the Werner and Lyman molecular bands intensity. The Lyman-{beta} intensity shows little changes in the range of 5%-30% of hydrogen in the mixture while the Lyman-{alpha} intensity tends to decrease as the percentage of hydrogen increases.

• OSTI ID: 22162805
• Journal Information: Applied Physics Letters, Vol. 102, Issue 11; Other Information: (c) 2013 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
EMISSION
FAR ULTRAVIOLET RADIATION
GHZ RANGE
HIGH-FREQUENCY DISCHARGES
HYDROGEN
MICROWAVE RADIATION
MIXTURES
PLASMA
RESONANCE
SPECTRA
ULTRAVIOLET RADIATION