Charge exchange spectroscopy of multiply charged ions of industrial and astrophysical interest

Journal Article · Thu Jul 11 00:00:00 EDT 2013 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4815854· OSTI ID:22121638

Tanuma, Hajime ^[1]

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1. Department of Physics, Tokyo Metropolitan University, 1-1 Minami-Ohsawa, Hachioji, Tokyo 192-0397 (Japan)

Photon emission spectra have been measured in collisions of multiply charged ions with neutral target gases in keV collision energies. Extreme ultra-violet emission spectra of Xe and Sn ions have contributed to give the atomic data for the understanding of the light source plasmas for the next generation semiconductor lithography. And soft X-ray emission spectra of highly charged O ions have related to the solar wind charge exchange, and the results have been regarded as the useful data for the understanding the collisions of the solar wind ions with the neutral matter within the heliosphere.

• OSTI ID: 22121638
• Journal Information: AIP Conference Proceedings, Vol. 1545, Issue 1; Conference: ICAMDATA-2012: 8. international conference on atomic and molecular data and their applications, Gaithersburg, MD (United States), 30 Sep - 4 Oct 2012; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

74 ATOMIC AND MOLECULAR PHYSICS
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ATOMS
CHARGE EXCHANGE
EMISSION SPECTRA
HELIOSPHERE
KEV RANGE
LIGHT SOURCES
MULTICHARGED IONS
OXYGEN IONS
PHOTON EMISSION
PLASMA
SEMICONDUCTOR MATERIALS
SOFT X RADIATION
SOLAR WIND
TIN IONS
XENON IONS
X-RAY SPECTRA