Studies of thin films of Ti- Zr -V as non-evaporable getter films prepared by RF sputtering

Journal Article · Tue Feb 05 00:00:00 EST 2013 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4791277· OSTI ID:22113519

Gupta, Nidhi; Jagannath,; Sharma, R. K.; Gadkari, S. C.; Muthe, K. P.; Mukundhan, R.; Gupta, S. K. ^[1]

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1. Technical Physics Division, BARC Mumbai-400085 (India)

Non-Evaporable Getter (NEG) films of the Ti-Zr-V prepared on stainless steel substrates by Radio Frequency sputtering. To observe its getter behavior at the lowest activation temperature, the sample is heated continuously at different temperatures (100 Degree-Sign C, 150 Degree-Sign C, 200 Degree-Sign C and 250 Degree-Sign C) for 2 hours. The changes of the surface chemical composition at different temperaturesare analyzed by using XPS and SEM (Scanning Electron Microscopy) techniques. The volume elemental composition of the film has been measured by energy dispersive X-ray spectroscopy (EDX). The in-situ XPS measurements of the activated getter films show the disappearance of the superficial oxide layer through the variation in the oxygen stoichiometry during thermal activation. Results of these studies show that the deposited films of Ti-Zr-V could be used as NEG to produce extreme high vacuum.

• OSTI ID: 22113519
• Journal Information: AIP Conference Proceedings, Vol. 1512, Issue 1; Conference: 57. DAE solid state physics symposium 2012, Mumbai (India), 3-7 Dec 2012; Other Information: (c) 2013 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
36 MATERIALS SCIENCE
CHEMICAL COMPOSITION
GETTERS
LAYERS
MULTI-ELEMENT ANALYSIS
QUANTITATIVE CHEMICAL ANALYSIS
RADIOWAVE RADIATION
SCANNING ELECTRON MICROSCOPY
SPUTTERING
STAINLESS STEELS
SUBSTRATES
TEMPERATURE DEPENDENCE
THIN FILMS
TITANIUM ALLOYS
VANADIUM ALLOYS
X-RAY FLUORESCENCE ANALYSIS
X-RAY PHOTOELECTRON SPECTROSCOPY
X-RAY SPECTROSCOPY
ZIRCONIUM ALLOYS