Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases

Lee, Hyo-Chang; Hwang, Hye-Ju; Kim, Young-Cheol; Kim, June Young; Kim, Dong-Hwan; Chung, Chin-Wook

doi:10.1063/1.4794344

Title: Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases

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Abstract

Experimental verification of the Boltzmann relation is performed in argon and oxygen gas inductively coupled plasmas from the measurements of both the spatial electron currents (as a fluid approach) and the electron energy probability functions (EEPFs, as a kinetic approach). At a low gas pressure of 10 mTorr, the measured electron currents are spatially uniform, and the EEPFs in the total electron energy scale are identical, which indicate that the Boltzmann relation is valid at both the argon and oxygen gases. As the gas pressure increases to 30-40 mTorr, however, the Boltzmann relation is broken in the oxygen gas discharge, while the Boltzmann relation is still valid in the argon gas discharge. This different variation in the oxygen gas discharge is mainly due to the presence of various inelastic collisions in the entire electron energy region, which causes the transition of the electron kinetics from a non-local to a local regime.

Authors:

Lee, Hyo-Chang; Hwang, Hye-Ju; Kim, Young-Cheol; Kim, June Young; Kim, Dong-Hwan; Chung, Chin-Wook ^[1]

Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791 (Korea, Republic of)

Publication Date:: Fri Mar 15 00:00:00 EDT 2013

OSTI Identifier:: 22107720

Resource Type:: Journal Article

Journal Name:: Physics of Plasmas

Additional Journal Information:: Journal Volume: 20; Journal Issue: 3; Other Information: (c) 2013 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1070-664X

Country of Publication:: United States

Language:: English

Subject:: 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; BOLTZMANN EQUATION; COLLISIONS; COMPARATIVE EVALUATIONS; ELECTRONS; INELASTIC SCATTERING; KINETICS; MOLECULES; OXYGEN; PLASMA PRESSURE; THERMODYNAMICS; TRANSPORT THEORY; VERIFICATION

Citation Formats


                    Lee, Hyo-Chang, Hwang, Hye-Ju, Kim, Young-Cheol, Kim, June Young, Kim, Dong-Hwan, and Chung, Chin-Wook. Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases.  United States: N. p., 2013. 
        Web.  doi:10.1063/1.4794344.

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                    Lee, Hyo-Chang, Hwang, Hye-Ju, Kim, Young-Cheol, Kim, June Young, Kim, Dong-Hwan, & Chung, Chin-Wook. Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases.  United States.  https://doi.org/10.1063/1.4794344

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                    Lee, Hyo-Chang, Hwang, Hye-Ju, Kim, Young-Cheol, Kim, June Young, Kim, Dong-Hwan, and Chung, Chin-Wook. 2013.  
        "Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases".  United States.  https://doi.org/10.1063/1.4794344.

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@article{osti_22107720,

  title        = {Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases},

  author       = {Lee, Hyo-Chang and Hwang, Hye-Ju and Kim, Young-Cheol and Kim, June Young and Kim, Dong-Hwan and Chung, Chin-Wook},

  abstractNote = {Experimental verification of the Boltzmann relation is performed in argon and oxygen gas inductively coupled plasmas from the measurements of both the spatial electron currents (as a fluid approach) and the electron energy probability functions (EEPFs, as a kinetic approach). At a low gas pressure of 10 mTorr, the measured electron currents are spatially uniform, and the EEPFs in the total electron energy scale are identical, which indicate that the Boltzmann relation is valid at both the argon and oxygen gases. As the gas pressure increases to 30-40 mTorr, however, the Boltzmann relation is broken in the oxygen gas discharge, while the Boltzmann relation is still valid in the argon gas discharge. This different variation in the oxygen gas discharge is mainly due to the presence of various inelastic collisions in the entire electron energy region, which causes the transition of the electron kinetics from a non-local to a local regime.},

  doi          = {10.1063/1.4794344},

  url          = {https://www.osti.gov/biblio/22107720},
  journal      = {Physics of Plasmas},

  issn         = {1070-664X},

  number       = 3,

  volume       = 20,

  place        = {United States},

  year         = {Fri Mar 15 00:00:00 EDT 2013},

  month        = {Fri Mar 15 00:00:00 EDT 2013}

}

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