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Title: Multifunctional bulk plasma source based on discharge with electron injection

Abstract

A bulk plasma source, based on a high-current dc glow discharge with electron injection, is described. Electron injection and some special design features of the plasma arc emitter provide a plasma source with very long periods between maintenance down-times and a long overall lifetime. The source uses a sectioned sputter-electrode array with six individual sputter targets, each of which can be independently biased. This discharge assembly configuration provides multifunctional operation, including plasma generation from different gases (argon, nitrogen, oxygen, acetylene) and deposition of composite metal nitride and oxide coatings.

Authors:
;  [1];  [1]; ; ;  [2]
  1. Tomsk State University of Control Systems and Radioelectronics, Tomsk 634050 (Russian Federation)
  2. Institute of High Current Electronics, Tomsk 634055 (Russian Federation)
Publication Date:
OSTI Identifier:
22105353
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 84; Journal Issue: 1; Other Information: (c) 2013 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ACETYLENE; ARGON; ELECTRIC ARCS; ELECTRODES; ELECTRON BEAM INJECTION; GLOW DISCHARGES; NITROGEN; OXIDES; OXYGEN; SPUTTERING

Citation Formats

Klimov, A. S., Medovnik, A. V., Tyunkov, A. V., Institute of High Current Electronics, Tomsk 634055, Savkin, K. P., Shandrikov, M. V., and Vizir, A. V. Multifunctional bulk plasma source based on discharge with electron injection. United States: N. p., 2013. Web. doi:10.1063/1.4788939.
Klimov, A. S., Medovnik, A. V., Tyunkov, A. V., Institute of High Current Electronics, Tomsk 634055, Savkin, K. P., Shandrikov, M. V., & Vizir, A. V. Multifunctional bulk plasma source based on discharge with electron injection. United States. https://doi.org/10.1063/1.4788939
Klimov, A. S., Medovnik, A. V., Tyunkov, A. V., Institute of High Current Electronics, Tomsk 634055, Savkin, K. P., Shandrikov, M. V., and Vizir, A. V. 2013. "Multifunctional bulk plasma source based on discharge with electron injection". United States. https://doi.org/10.1063/1.4788939.
@article{osti_22105353,
title = {Multifunctional bulk plasma source based on discharge with electron injection},
author = {Klimov, A. S. and Medovnik, A. V. and Tyunkov, A. V. and Institute of High Current Electronics, Tomsk 634055 and Savkin, K. P. and Shandrikov, M. V. and Vizir, A. V.},
abstractNote = {A bulk plasma source, based on a high-current dc glow discharge with electron injection, is described. Electron injection and some special design features of the plasma arc emitter provide a plasma source with very long periods between maintenance down-times and a long overall lifetime. The source uses a sectioned sputter-electrode array with six individual sputter targets, each of which can be independently biased. This discharge assembly configuration provides multifunctional operation, including plasma generation from different gases (argon, nitrogen, oxygen, acetylene) and deposition of composite metal nitride and oxide coatings.},
doi = {10.1063/1.4788939},
url = {https://www.osti.gov/biblio/22105353}, journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 1,
volume = 84,
place = {United States},
year = {Tue Jan 15 00:00:00 EST 2013},
month = {Tue Jan 15 00:00:00 EST 2013}
}