Utilizing upper hybrid resonance for high density plasma production and negative ion generation in a downstream region
- Department of Physics, Indian Institute of Technology, Kanpur 208016 (India)
Localized wave-induced resonances are created by microwaves launched directly into a multicusp (MC) plasma device in the k Up-Tack B mode, where k is the wave vector and B is the static magnetic field. The resonance zone is identified as upper hybrid resonance (UHR), and lies r = {approx}22 mm away from the MC boundary. Measurement of radial wave electric field intensity confirms the right hand cutoff of the wave (r = 22.5-32.1 mm) located near the UHR zone. A sharp rise in the corresponding electron temperature in the resonance region by {approx}13 eV from its value away from resonance at r = 0, is favorable for the generation of vibrationally excited molecules of hydrogen. A transverse magnetic filter allows cold electrons ({approx}1-2 eV) to pass into the downstream region where they generate negative ions by dissociative attachment. Measurements of electron energy distribution function (EEDF) support the viewpoint. H{sup -} current density of {approx}0.26 mA/cm{sup 2} is obtained at a wave power density of {approx}3 W/cm{sup 2} at 2.0 mTorr pressure, which agrees reasonably well with results obtained from a steady state model using particle balance equations.
- OSTI ID:
- 22089448
- Journal Information:
- Journal of Applied Physics, Vol. 112, Issue 6; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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