Generating electron cyclotron resonance plasma using distributed scheme

Journal Article · Mon Aug 06 00:00:00 EDT 2012 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4745189· OSTI ID:22089356

Huang, C. C. ^[1]; Chang, T. H.; Chen, N. C.; Chao, H. W. ^[2]; Chen, C. C. ^[3]; Chou, S. F. ^[1]

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1. Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan (China)
2. Department of Physics, National Tsing Hua University, Hsinchu, Taiwan (China)
3. Chung-Shan Institute of Science and Technology, Lung-Tan, Taoyuan, Taiwan (China)

This study employs a distributed microwave input system and permanent magnets to generate large-area electron cyclotron resonance (ECR) plasma. ECR plasmas were generated with nitrogen gas, and the plasma density was measured by Langmuir probe. A uniform ECR plasma with the electron density fluctuation of {+-}9.8% over 500 mm Multiplication-Sign 500 mm was reported. The proposed idea of generating uniform ECR plasma can be scaled to a much larger area by using n Multiplication-Sign n microwave input array system together with well-designed permanent magnets.

• OSTI ID: 22089356
• Journal Information: Applied Physics Letters, Vol. 101, Issue 6; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ELECTRON CYCLOTRON-RESONANCE
ELECTRON DENSITY
FLUCTUATIONS
LANGMUIR PROBE
MICROWAVE RADIATION
PERMANENT MAGNETS
PLASMA
PLASMA DENSITY