Design of free patterns of nanocrystals with ad hoc features via templated dewetting

Journal Article · Mon Jul 02 00:00:00 EDT 2012 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4730620· OSTI ID:22089264

Aouassa, M.; Berbezier, I.; Favre, L.; Ronda, A. ^[1]; Bollani, M.; Sordan, R. ^[2]; Delobbe, A.; Sudraud, P. ^[3]

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1. IM2NP, CNRS, AMU, Marseille (France)
2. LNES, Como (Italy)
3. Orsay Physics, Fuveau (France)

Design of monodisperse ultra-small nanocrystals (NCs) into large scale patterns with ad hoc features is demonstrated. The process makes use of solid state dewetting of a thin film templated through alloy liquid metal ion source focused ion beam (LMIS-FIB) nanopatterning. The solid state dewetting initiated at the edges of the patterns controllably creates the ordering of NCs with ad hoc placement and periodicity. The NC size is tuned by varying the nominal thickness of the film while their position results from the association of film retraction from the edges of the lay out and Rayleigh-like instability. The use of ultra-high resolution LMIS-FIB enables to produce monocrystalline NCs with size, periodicity, and placement tunable as well. It provides routes for the free design of nanostructures for generic applications in nanoelectronics.

• OSTI ID: 22089264
• Journal Information: Applied Physics Letters, Vol. 101, Issue 1; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
77 NANOSCIENCE AND NANOTECHNOLOGY
ALLOYS
DESIGN
INSTABILITY
ION BEAMS
ION SOURCES
LIQUID METALS
MOLECULAR BEAM EPITAXY
NANOSTRUCTURES
PERIODICITY
RESOLUTION
SEMICONDUCTOR MATERIALS
SILICON
SOLIDS
THICKNESS
THIN FILMS