Enhanced production of ECR plasma by using pulse mode microwaves on a large bore ECRIS with permanent magnets
- Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka Univ., 2-1 Ymadaoka, Suita-shi, Osaka, 565-0871 (Japan)
In order to enhance the efficiency of an electron cyclotron resonance (ECR) plasma for a broad and dense ion beam source at low pressure, the magnetic field configuration is constructed by all permanent magnets. By using the pulse mode, we aim at the generation of plasma with parameters that cannot be achieved in the CW mode at microwave frequencies of 11-13GHz, under the constraint of the same average incident microwave powers. It is found that the total beam currents are increased by the pulse mode operation compared with the case of the CW mode. According to probe measurements of the ECR plasma, it is found that the electron density in the pulse mode is larger than that in the CW mode, while the electron temperatures in the pulse mode are lower than that in the CW mode. These results are discussed from the viewpoint of relaxation times obtained on plasma parameters and ECR efficiency. The cause of the beam current increment and operational windows spread due to the pulse mode are also discussed on these parameters suitable to production of molecular/cluster ions.
- OSTI ID:
- 22075729
- Journal Information:
- AIP Conference Proceedings, Vol. 1496, Issue 1; Conference: 19. international conference on ion implantation technology, Valladolid (Spain), 25-29 Jun 2012; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
BEAM CURRENTS
ECR ION SOURCES
ELECTRON CYCLOTRON-RESONANCE
ELECTRON DENSITY
ELECTRON TEMPERATURE
ION BEAMS
ION TEMPERATURE
IONS
MAGNETIC FIELD CONFIGURATIONS
MICROWAVE RADIATION
MOLECULAR CLUSTERS
PERMANENT MAGNETS
PLASMA
PLASMA CONFINEMENT
PLASMA DENSITY
PLASMA PRODUCTION
RELAXATION
RF SYSTEMS