Computational characterization of cutoff probe system for the measurement of electron density

Journal Article · Tue May 15 00:00:00 EDT 2012 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.4719699· OSTI ID:22072359

Na, Byung-Keun; Kim, Dae-Woong; Kwon, Jun-Hyuk; Chang, Hong-Young ^[1]; Kim, Jung-Hyung; You, Shin-Jae ^[2]

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1. Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon, 305-701 (Korea, Republic of)
2. Center for Vacuum Technology, Korea Research Institute of Standards and Science, Daejeon, 305-306 (Korea, Republic of)

The wave cutoff probe, a precise measurement method for measuring the electron density, was recently proposed. To characterize the cutoff probe system, in this paper, the microwave simulations of a cutoff probe system were performed at various configurations of the cutoff probe system. The influence of the cutoff probe spectrum stemming from numerous parametric elements such as the probe tip length, probe tip distance, probe tip plane orientation, chamber volume/geometry, and coaxial cable length is presented and discussed. This article is expected to provide qualitative and quantitative insight into cutoff probe systems and its optimization process.

• OSTI ID: 22072359
• Journal Information: Physics of Plasmas, Vol. 19, Issue 5; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
CALCULATION METHODS
COAXIAL CABLES
CONFIGURATION
ELECTRON DENSITY
GEOMETRY
LANGMUIR PROBE
MEASURING METHODS
MICROWAVE RADIATION
OPTIMIZATION
PLASMA SIMULATION