Optimal design and fabrication of three-dimensional calibration specimens for scanning probe microscopy

Journal Article · Tue May 15 00:00:00 EDT 2012 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4719661· OSTI ID:22072306

Xiaoning, Liu; Tingting, Luo; Yuhang, Chen; Wenhao, Huang ^[1]; Piaszenski, Guido ^[2]

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1. Department of Precision Machinery and Instrumentation, University of Science and Technology of China, 230026 Hefei (China)
2. Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund (Germany)

Micro-/nano-scale roughness specimens are highly demanded to synthetically calibrate the scanning probe microscopy (SPM) instrument. In this study, three-dimensional (3D) specimens with controllable main surface evaluation parameters were designed. In order to improve the design accuracy, the genetic algorithm was introduced into the conventional digital filter method. A primary 3D calibration specimen with the dimension of 10 {mu}m x 10 {mu}m was fabricated by electron beam lithography. Atomic force microscopy characterizations demonstrated that the statistical and spectral parameters of the fabricated specimen match well with the designed values. Such a kind of 3D specimens has the potential to calibrate the SPM for applications in quantitative surface evaluations.

• OSTI ID: 22072306
• Journal Information: Review of Scientific Instruments, Vol. 83, Issue 5; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ACCURACY
ALGORITHMS
ATOMIC FORCE MICROSCOPY
CALIBRATION
DESIGN
DIGITAL FILTERS
ELECTRON BEAMS
PROBES
ROUGHNESS
THREE-DIMENSIONAL CALCULATIONS