Compact electrostatic beam optics for multi-element focused ion beams: Simulation and experiments
- Department of Physics, Indian Institute of Technology, Kanpur 208016, Uttar Pradesh (India)
Electrostatic beam optics for a multi-element focused ion beam (MEFIB) system comprising of a microwave multicusp plasma (ion) source is designed with the help of two widely known and commercially available beam simulation codes: AXCEL-INP and SIMION. The input parameters to the simulations are obtained from experiments carried out in the system. A single and a double Einzel lens system (ELS) with and without beam limiting apertures (S) have been investigated. For a 1 mm beam at the plasma electrode aperture, the rms emittance of the focused ion beam is found to reduce from {approx}0.9 mm mrad for single ELS to {approx}0.5 mm mrad for a double ELS, when S of 0.5 mm aperture size is employed. The emittance can be further improved to {approx}0.1 mm mrad by maintaining S at ground potential, leading to reduction in beam spot size ({approx}10 {mu}m). The double ELS design is optimized for different electrode geometrical parameters with tolerances of {+-}1 mm in electrode thickness, electrode aperture, inter electrode distance, and {+-}1{sup o} in electrode angle, providing a robust design. Experimental results obtained with the double ELS for the focused beam current and spot size, agree reasonably well with the simulations.
- OSTI ID:
- 22063626
- Journal Information:
- Review of Scientific Instruments, Vol. 82, Issue 1; Other Information: (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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