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Title: Features of Controlled Laser Thermal Cleavage of Crystalline Silicon

Journal Article · · Crystallography Reports

Controlled laser thermal cleavage of crystalline silicon has been numerically simulated. A 3D analysis of the thermoelastic fields formed in a single-crystal silicon wafer as a result of successive laser heating and exposure to a coolant was performed for three different versions of anisotropy. The simulation was performed for laser irradiation with different wavelengths: 1.06 and 0.808 {mu}m. The calculation results have been experimentally verified using a YAG laser. The results can be used in the electronics industry to optimize the precise separation of silicon wafers into crystals.

OSTI ID:
22054077
Journal Information:
Crystallography Reports, Vol. 55, Issue 6; Other Information: Copyright (c) 2010 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-7745
Country of Publication:
United States
Language:
English