Microstructure and corrosion resistance of nanocrystalline TiZrN films on AISI 304 stainless steel substrate

Journal Article · Thu Jul 15 00:00:00 EDT 2010 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.3305963· OSTI ID:22053733

Lin, Yu-Wei; Huang, Jia-Hong; Yu, Ge-Ping ^[1]

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1. Instrument Technology Research Center, 20 R and D Road VI, Hsinchu Science-Based Industrial Park, Hsinchu 300, Taiwan, Republic of China and Department of Engineering and System Science, National Tsing Hua University, 101 Kuang Fu Rd., Sec. 2, Hsinchu 300, Taiwan (China)

This study investigated the microstructure and properties of nanocrystalline TiZrN films on AISI 304 stainless steel substrate. TiZrN films were prepared by reactive magnetron sputtering based on the previous optimum coating conditions (substrate temperature, system pressure, nitrogen flow, etc.) for TiN and ZrN thin films. The composition ratio of TiZrN coatings were adjusted by changing the Zr target power, while keeping the Ti target power constant. Experiments were conduced to find the optimum composition with desired properties. The ratio of TiZrN composition was analyzed by x-ray photoelectron spectroscopy and Rutherford backscattering spectrometer. In terms of phase formation, there were two types of coatings that were considered: single-phase solid solutions of TiZrN and interlacing nuclei of TiZr in the matrix of TiZrN. The thickness of all TiZrN films as measured by the secondary ion mass spectroscopy was about 500 nm, and the composition depth profiles indicated that the compositions in the TiZrN films were uniform from the film surface to the 304 stainless steel substrate. The crystal structure of the TiZrN films was determined by x-ray diffraction using a M18XHF-SRA diffractometer with Cu K{sub {alpha}} radiation. A diffraction peak of TiZrN (002) was observed between that of TiN (002) and ZrN (002); similarly, a diffraction peak of TiZrN (111) was observed between that of TiN(111) and ZrN(111), respectively. The corrosion resistance of the TiZrN film deposited on the 304 stainless steel has been investigated by electrochemical measurement. The electrolyte, 0.5M H{sub 2}SO{sub 4} containing 0.05M KSCN, was used for the potentiodynamic polarization. The potentiodynamic scan was conducted from -800 to 800 mV standard calomel electrode (SCE).

• OSTI ID: 22053733
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Vol. 28, Issue 4; Other Information: (c) 2010 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CORROSION RESISTANCE
ELECTROLYTES
ION MICROPROBE ANALYSIS
MAGNETRONS
MATRIX MATERIALS
NANOSTRUCTURES
POLARIZATION
RUTHERFORD BACKSCATTERING SPECTROSCOPY
SOLID SOLUTIONS
SPUTTERING
STAINLESS STEEL-304
SULFURIC ACID
SURFACE COATING
THIN FILMS
TITANIUM NITRIDES
X-RAY DIFFRACTION
X-RAY PHOTOELECTRON SPECTROSCOPY
ZIRCONIUM NITRIDES