Structure and mechanical properties of nanoscale multilayered CrN/ZrSiN coatings

Journal Article · Wed Jul 15 00:00:00 EDT 2009 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.3136856· OSTI ID:22053497

Zhang, Z G; Rapaud, O; Allain, N; Baraket, M; Dong, C; Coddet, C ^[1]

---

1. State Key Laboratory of Materials Modification, Dalian University of Technology, Dalian 116024, China and LERMPS, Universite de Technologie de Belfort-Montbeliard (UTBM), Site de Montbeliard, F-90010 Belfort Cedex (France)

Nanocrystalline/amorphous CrN/ZrSiN multilayer coatings with a bilayer thickness ranging from 11 to 153 nm were prepared by reactive magnetron sputtering technique. The microstructure and mechanical properties of these thin films were characterized by x-ray diffraction (XRD), scanning electron microscopy, transmission electron microscopy (TEM), Fourier transform infrared spectroscopy (FTIR), and nanoindentation. The formation of nanocrystalline CrN and nanocomposite ZiSiN in the single layer coatings was identified by XRD and FTIR. The periodic structure of the as-deposited multilayer coatings was confirmed by TEM observation. Nanoindentation tests showed that both the values of hardness (H) and reduced elastic modulus (E{sub r}) of CrN/ZrSiN multilayers remained almost constant despite varying the bilayer thickness. The multilayer coatings exhibited higher H of 30 GPa and higher resistance to plastic deformation when compared to the single layer CrN and ZrSiN coatings.

• OSTI ID: 22053497
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Vol. 27, Issue 4; Other Information: (c) 2009 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
AMORPHOUS STATE
CHROMIUM NITRIDES
COATINGS
COMPOSITE MATERIALS
CRYSTALS
FOURIER TRANSFORM SPECTROMETERS
FOURIER TRANSFORMATION
HARDNESS
INFRARED SPECTRA
LAYERS
MICROSTRUCTURE
NANOSTRUCTURES
PLASTICITY
PRESSURE RANGE GIGA PA
SCANNING ELECTRON MICROSCOPY
SPUTTERING
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION
ZIRCONIUM SILICIDES