Magnetic force driven six degree-of-freedom active vibration isolation system using a phase compensated velocity sensor

Kim, Yongdae; Park, Kyihwan; Kim, Sangyoo

doi:10.1063/1.3117462

Title: Magnetic force driven six degree-of-freedom active vibration isolation system using a phase compensated velocity sensor

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Abstract

A six-axis active vibration isolation system (AVIS) is developed using voice coil actuators. Point contact configuration is employed to have an easy assembly of eight voice coil actuators to an upper and a base plates. The velocity sensor, using an electromagnetic principle that is commonly used in the vibration control, is investigated since its phase lead characteristic causes an instability problem for a low frequency vibration. The performances of the AVIS are investigated in the frequency domain and finally validated by comparing with the passive isolation system using the atomic force microscope images.

Authors:

Kim, Yongdae; Park, Kyihwan ^[1]; Kim, Sangyoo ^[2]

Department of Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Gwangju 500-712 (Korea, Republic of)
Compressor Group, Digital Appliance Laboratory LG Electronics, Gaeumjeong-Dong, Changwon, Gyeongnam 641-711 (Korea, Republic of)

Publication Date:: Wed Apr 15 00:00:00 EDT 2009

OSTI Identifier:: 22053479

Resource Type:: Journal Article

Journal Name:: Review of Scientific Instruments

Additional Journal Information:: Journal Volume: 80; Journal Issue: 4; Other Information: (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748

Country of Publication:: United States

Language:: English

Subject:: 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ACTUATORS; ATOMIC FORCE MICROSCOPY; DAMPING; DEGREES OF FREEDOM; ELECTRIC CONTACTS; INSTABILITY; MAGNETIC FLUX; MECHANICAL VIBRATIONS; PERFORMANCE; VELOCITY

Citation Formats


                    Kim, Yongdae, Park, Kyihwan, and Kim, Sangyoo. Magnetic force driven six degree-of-freedom active vibration isolation system using a phase compensated velocity sensor.  United States: N. p., 2009. 
        Web.  doi:10.1063/1.3117462.

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                    Kim, Yongdae, Park, Kyihwan, & Kim, Sangyoo. Magnetic force driven six degree-of-freedom active vibration isolation system using a phase compensated velocity sensor.  United States.  https://doi.org/10.1063/1.3117462

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                    Kim, Yongdae, Park, Kyihwan, and Kim, Sangyoo. 2009.  
        "Magnetic force driven six degree-of-freedom active vibration isolation system using a phase compensated velocity sensor".  United States.  https://doi.org/10.1063/1.3117462.

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@article{osti_22053479,

  title        = {Magnetic force driven six degree-of-freedom active vibration isolation system using a phase compensated velocity sensor},

  author       = {Kim, Yongdae and Park, Kyihwan and Kim, Sangyoo},

  abstractNote = {A six-axis active vibration isolation system (AVIS) is developed using voice coil actuators. Point contact configuration is employed to have an easy assembly of eight voice coil actuators to an upper and a base plates. The velocity sensor, using an electromagnetic principle that is commonly used in the vibration control, is investigated since its phase lead characteristic causes an instability problem for a low frequency vibration. The performances of the AVIS are investigated in the frequency domain and finally validated by comparing with the passive isolation system using the atomic force microscope images.},

  doi          = {10.1063/1.3117462},

  url          = {https://www.osti.gov/biblio/22053479},
  journal      = {Review of Scientific Instruments},

  issn         = {0034-6748},

  number       = 4,

  volume       = 80,

  place        = {United States},

  year         = {Wed Apr 15 00:00:00 EDT 2009},

  month        = {Wed Apr 15 00:00:00 EDT 2009}

}

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