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Title: Measurements of plasma potential in high-pressure microwave plasmas

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.3125624· OSTI ID:22053470
;  [1];  [2]
  1. Department of Math and Physics, Troy University, Troy, Alabama 36082 (United States)
  2. Department of Physics, Auburn University, Auburn, Alabama 36849 (United States)

Plasma potential of a high-pressure ({approx}1 Torr) microwave-generated argon plasma is measured using a Langmuir probe and a cold emissive probe. The operation of a hot emissive probe in a high-pressure plasma has been very difficult due to frequent burn-outs and significantly reduced lifetime of the probe filament, which, in turn, limits the possibility of collecting a wide range of data. The I-V characteristics from both Langmuir and emissive probes are interpreted using the collisionless probe theory since the collision correction factor is not very significant. The plasma potential determined from both Langmuir and cold emissive probe characteristics agrees well with one another and is observed to be dependent on the operating gas pressure but relatively unchanged as a function of the microwave power. An average plasma potential determined over the operating range of microwave powers varies nonlinearly with the gas pressure.

OSTI ID:
22053470
Journal Information:
Review of Scientific Instruments, Vol. 80, Issue 4; Other Information: (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
Country of Publication:
United States
Language:
English