skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Negative plasma potential in a multidipole chamber with a dielectric coated plasma boundary

Journal Article · · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
DOI:https://doi.org/10.1116/1.4705514· OSTI ID:22051369
;  [1]
  1. Department of Nuclear Engineering and Engineering Physics, University of Wisconsin-Madison, Madison, Wisconsin 53706 (United States)

Negative plasma potentials with respect to a grounded wall that was coated with a dielectric have been achieved in an electropositive plasma confined by a multidipole device. A Langmuir probe was used to measure the density and temperatures of the bi-Maxwellian distribution electrons and an emissive probe was used to measure the plasma potential profile near the plasma boundary. For many discharge parameters, the potential profile was that of a typical electropositive sheath, but it was shifted negative due to negative charge accumulated on the plasma-surface boundary. A virtual cathode was observed near the boundary when the neutral pressure, primary electron energy, and/or discharge current were low ({approx}2 x 10{sup -4} Torr, {approx}60 eV, and 80 mA, respectively). The behavior of the sheath potential was shown to be consistent with that predicted by particle balance and a qualitative mechanism for wall charging is presented.

OSTI ID:
22051369
Journal Information:
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Vol. 30, Issue 3; Other Information: (c) 2012 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1553-1813
Country of Publication:
United States
Language:
English