A compact surface decontamination system for surface-sensitive magnetic imaging
Journal Article
·
· Review of Scientific Instruments
- Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Higashi, Tsukuba 305-8562 (Japan)
- Research Core for Correlated Electrons, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568 (Japan)
- Multiferroics Project, ERATO-JST, and Cross-correlation Materials Research Group (CMRG), RIKEN, Wako, Saitama 351-0198 (Japan) and Department of Applied Physics, University of Tokyo, Tokyo 113-8656 (Japan)
A surface decontamination system for application in surface sensitive magnetic imaging tools, such as a spin-polarized scanning electron microscope, is described. Adsorbed contaminant is chemically decomposed with the use of active oxygen in a compact vacuum chamber mounted in a microscope. The present method is especially suitable for fragile magnetic surfaces of complex oxide materials to which the conventional physical etching widely used for magnetic metals could cause serious structural damage. We have succeeded in detecting magnetic signals from a decontaminated oxide surface and visualizing domain images with sufficient magnetic contrast to analyze detailed domain structures.
- OSTI ID:
- 22051029
- Journal Information:
- Review of Scientific Instruments, Vol. 80, Issue 8; Other Information: (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
DECONTAMINATION
DOMAIN STRUCTURE
ETCHING
MAGNETIC SURFACES
MICROSCOPES
OXIDES
SCANNING ELECTRON MICROSCOPY
SIGNALS
SPIN ORIENTATION
SURFACE CLEANING
SURFACE CONTAMINATION
THIN FILMS
VACUUM SYSTEMS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
DECONTAMINATION
DOMAIN STRUCTURE
ETCHING
MAGNETIC SURFACES
MICROSCOPES
OXIDES
SCANNING ELECTRON MICROSCOPY
SIGNALS
SPIN ORIENTATION
SURFACE CLEANING
SURFACE CONTAMINATION
THIN FILMS
VACUUM SYSTEMS