Growth of high-quality SrTiO{sub 3} films using a hybrid molecular beam epitaxy approach
Journal Article
·
· Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
- Materials Department, University of California, Santa Barbara, California 93106-5050 (United States)
A hybrid molecular beam epitaxy approach for atomic-layer controlled growth of high-quality SrTiO{sub 3} films with scalable growth rates was developed. The approach uses an effusion cell for Sr, a plasma source for oxygen, and a metal-organic source (titanium tetra isopropoxide) for Ti. SrTiO{sub 3} films were investigated as a function of cation flux ratio on (001) SrTiO{sub 3} and (LaAlO{sub 3}){sub 0.3}(Sr{sub 2}AlTaO{sub 6}){sub 0.7} (LSAT) substrates. Growth conditions for stoichiometric insulating films were identified. Persistent (>180 oscillations) reflection high-energy electron diffraction oscillation characteristic of layer-by-layer growth were observed. The full widths at half maximum of x-ray diffraction rocking curves were similar to those of the substrates, i.e., 34 arc sec on LSAT. The film surfaces were nearly ideal with root mean square surface roughness values of less than 0.1 nm. The relationship between surface reconstructions, growth modes, and stoichiometry is discussed.
- OSTI ID:
- 22050984
- Journal Information:
- Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 3 Vol. 27; ISSN 1553-1813
- Country of Publication:
- United States
- Language:
- English
Similar Records
Self-healing Growth of LaNiO3 on a Mixed-Terminated Perovskite Surface
Band alignment of epitaxial SrTiO3 thin films with (LaAlO3)0.3-(Sr2AlTaO6)0.7 (001)
Band alignment of epitaxial SrTiO{sub 3} thin films with (LaAlO{sub 3}){sub 0.3}-(Sr{sub 2}AlTaO{sub 6}){sub 0.7} (001)
Journal Article
·
Wed Mar 30 00:00:00 UTC 2022
· ACS Applied Materials and Interfaces
·
OSTI ID:1874046
Band alignment of epitaxial SrTiO3 thin films with (LaAlO3)0.3-(Sr2AlTaO6)0.7 (001)
Journal Article
·
Mon Sep 28 00:00:00 UTC 2015
· Applied Physics Letters
·
OSTI ID:1229940
Band alignment of epitaxial SrTiO{sub 3} thin films with (LaAlO{sub 3}){sub 0.3}-(Sr{sub 2}AlTaO{sub 6}){sub 0.7} (001)
Journal Article
·
Mon Sep 28 04:00:00 UTC 2015
· Applied Physics Letters
·
OSTI ID:22482162