A biresonant plasma source based on a gapped linear microwave vibrator
- Russian Academy of Sciences, Prokhorov Institute of General Physics (Russian Federation)
- Gubkin State University of Oil and Gas (Russian Federation)
The operating principle of a novel microwave plasma source-a linear microwave vibrator with a gap-is discussed. The source is placed on a microwave-transparent window of a chamber filled with a plasma-forming gas (argon or methane). The device operation is based on the combination of two resonances-geometric and plasma ones. The results of experimental tests of the source are presented. For a microwave frequency of 2.45 GHz, microwave power of {<=}1 kW, and plasma-forming gas pressure in the range 5 Multiplication-Sign 10{sup -2}-10{sup -1} Torr, the source is capable of filling the reactor volume with a plasma having an electron density of about 10{sup 12} cm{sup -3} and electron temperature of a few electronvolts.
- OSTI ID:
- 22047543
- Journal Information:
- Plasma Physics Reports, Vol. 37, Issue 3; Other Information: Copyright (c) 2011 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-780X
- Country of Publication:
- United States
- Language:
- English
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