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Title: A comprehensive study of different gases in inductively coupled plasma torch operating at one atmosphere

Abstract

A numerical study is done to understand the possible operating regimes of RF-ICP torch (3 MHz, 50 kW) using different gases for plasma formation at atmospheric pressure. A two dimensional numerical simulation of RF-ICP torch using argon, nitrogen, oxygen, and air as plasma gas has been investigated using computational fluid dynamic (CFD) software fluent{sup (c)}. The operating parameters varied here are central gas flow, sheath gas flow, RF-power dissipated in plasma, and plasma gas. The temperature contours, flow field, axial, and radial velocity profiles were investigated under different operating conditions. The plasma resistance, inductance of the torch, and the heat distribution for various plasma gases have also been investigated. The plasma impedance of ICP torch varies with different operating parameters and plays an important role for RF oscillator design and power coupling. These studies will be useful to decide the design criteria for ICP torches required for different material processing applications.

Authors:
 [1];  [2]; ;  [1];  [3];  [4]
  1. Electrical Engineering Department, V. J.T.I, Matunga, Mumbai 400019 (India)
  2. Faculty of Engineering and technology, MITS, lakshmangarh, (Sikar), Rajasthan 332311 (India)
  3. Laser and Plasma Technology Division, BARC, Mumbai 400085 (India)
  4. Department of Physics, University of Mumbai, Kalina, Santacruz(E) 400098 (India)
Publication Date:
OSTI Identifier:
22043548
Resource Type:
Journal Article
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 19; Journal Issue: 1; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1070-664X
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; AIR; ARGON; ATMOSPHERIC PRESSURE; COMPUTERIZED SIMULATION; DESIGN; ELECTRON TEMPERATURE; FLUID MECHANICS; GAS FLOW; IMPEDANCE; ION TEMPERATURE; NITROGEN; NUMERICAL ANALYSIS; OSCILLATORS; OXYGEN; PLASMA; PLASMA SHEATH; PLASMA SIMULATION; RADIAL VELOCITY; TWO-DIMENSIONAL CALCULATIONS

Citation Formats

Punjabi, Sangeeta B, Department of Physics, University of Mumbai, Kalina, Santacruz, Joshi, N K, Mangalvedekar, H A, Lande, B K, Das, A K, and Kothari, D C. A comprehensive study of different gases in inductively coupled plasma torch operating at one atmosphere. United States: N. p., 2012. Web. doi:10.1063/1.3676598.
Punjabi, Sangeeta B, Department of Physics, University of Mumbai, Kalina, Santacruz, Joshi, N K, Mangalvedekar, H A, Lande, B K, Das, A K, & Kothari, D C. A comprehensive study of different gases in inductively coupled plasma torch operating at one atmosphere. United States. https://doi.org/10.1063/1.3676598
Punjabi, Sangeeta B, Department of Physics, University of Mumbai, Kalina, Santacruz, Joshi, N K, Mangalvedekar, H A, Lande, B K, Das, A K, and Kothari, D C. 2012. "A comprehensive study of different gases in inductively coupled plasma torch operating at one atmosphere". United States. https://doi.org/10.1063/1.3676598.
@article{osti_22043548,
title = {A comprehensive study of different gases in inductively coupled plasma torch operating at one atmosphere},
author = {Punjabi, Sangeeta B and Department of Physics, University of Mumbai, Kalina, Santacruz and Joshi, N K and Mangalvedekar, H A and Lande, B K and Das, A K and Kothari, D C},
abstractNote = {A numerical study is done to understand the possible operating regimes of RF-ICP torch (3 MHz, 50 kW) using different gases for plasma formation at atmospheric pressure. A two dimensional numerical simulation of RF-ICP torch using argon, nitrogen, oxygen, and air as plasma gas has been investigated using computational fluid dynamic (CFD) software fluent{sup (c)}. The operating parameters varied here are central gas flow, sheath gas flow, RF-power dissipated in plasma, and plasma gas. The temperature contours, flow field, axial, and radial velocity profiles were investigated under different operating conditions. The plasma resistance, inductance of the torch, and the heat distribution for various plasma gases have also been investigated. The plasma impedance of ICP torch varies with different operating parameters and plays an important role for RF oscillator design and power coupling. These studies will be useful to decide the design criteria for ICP torches required for different material processing applications.},
doi = {10.1063/1.3676598},
url = {https://www.osti.gov/biblio/22043548}, journal = {Physics of Plasmas},
issn = {1070-664X},
number = 1,
volume = 19,
place = {United States},
year = {Sun Jan 15 00:00:00 EST 2012},
month = {Sun Jan 15 00:00:00 EST 2012}
}