Continuous-time photon-stimulated desorption spectroscopy studies on soft x-ray-induced reactions of CF{sub 3}Br adsorbed on Si(111)-7x7

Journal Article · Fri Oct 28 00:00:00 EDT 2011 · Journal of Chemical Physics

DOI:https://doi.org/10.1063/1.3655563· OSTI ID:22038748

Tsai, W -C; Wang, S -K; He, T -M; Chou, L -C; Hsieh, Y -C; Liao, K -Y; Chen, H -C; Wen, C -R ^[1]

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1. Department of Physics, National Cheng Kung University, Tainan 70101, Taiwan (China)

Continuous-time core-level photon-stimulated desorption (PSD) spectroscopy was used to study the soft x-ray-induced reactions of CF{sub 3}Br molecules adsorbed on Si(111)-7x7 near the Si(2p) edge (98-110 eV). The monochromatic synchrotron radiation was employed as a soft x-ray light source in the photon-induced reactions and also as a probe for investigating the produced fluorination states of the bonding surface Si atom in the positive-ion PSD spectroscopy. Several different surface coverages were investigated. The PSD spectra from the low-CF{sub 3}Br-covered surfaces show the production of surface SiF species, while those from the high-CF{sub 3}Br-covered surfaces depict the formation of surface SiF, SiF{sub 2}, and SiF{sub 3} species. The photolysis cross section of the submonolayer CF{sub 3}Br-covered surface is determined as {approx}4.3x10{sup -18} cm{sup 2}. A comparison with the results on CF{sub 3}Cl/Si(111)-7x7 surface is discussed.

• OSTI ID: 22038748
• Journal Information: Journal of Chemical Physics, Vol. 135, Issue 16; Other Information: (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-9606
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
36 MATERIALS SCIENCE
37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
ADSORPTION
BROMINATED ALIPHATIC HYDROCARBONS
CHEMISORPTION
CROSS SECTIONS
DESORPTION
FLUORINATED ALIPHATIC HYDROCARBONS
FLUORINATION
LIGHT SOURCES
MONOCHROMATIC RADIATION
PHOTOLYSIS
PHOTONS
SEMICONDUCTOR MATERIALS
SILICON
SOFT X RADIATION
SPECTROSCOPY
SURFACES
SYNCHROTRON RADIATION