Spectroscopic ellipsometer based on direct measurement of polarization ellipticity
A polarizer-sample-Wollaston prism analyzer ellipsometer is described in which the ellipsometric angles {psi} and {Delta} are determined by direct measurement of the elliptically polarized light reflected from the sample. With the Wollaston prism initially set to transmit p- and s-polarized light, the azimuthal angle P of the polarizer is adjusted until the two beams have equal intensity. This condition yields {psi}={+-}P and ensures that the reflected elliptically polarized light has an azimuthal angle of {+-}45 deg. and maximum ellipticity. Rotating the Wollaston prism through 45 deg. and adjusting the analyzer azimuth until the two beams again have equal intensity yields the ellipticity that allows {Delta} to be determined via a simple linear relationship. The errors produced by nonideal components are analyzed. We show that the polarizer dominates these errors but that for most practical purposes, the error in {psi} is negligible and the error in {Delta} may be corrected exactly. A native oxide layer on a silicon substrate was measured at a single wavelength and multiple angles of incidence and spectroscopically at a single angle of incidence. The best fit film thicknesses obtained were in excellent agreement with those determined using a traditional null ellipsometer.
- OSTI ID:
- 22036632
- Journal Information:
- Applied Optics, Vol. 50, Issue 18; Other Information: (c) 2011 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6935
- Country of Publication:
- United States
- Language:
- English
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