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Title: Surface profile measurement in white-light scanning interferometry using a three-chip color CCD

Abstract

White-light scanning interferometry (WLSI) is a useful technique to measure surface profile when a test object contains discontinuous structures or microstructures. A black and white CCD camera is usually utilized to capture interferograms, and a series of corresponding algorithms is used to achieve the profile measurement. However, the color information in the interferograms is lost. A novel profile measurement method that uses phase information in different color channels (red-green-blue) of an interferogram obtained using a three-chip color CCD in WLSI is proposed. The phase values are extracted by a windowed Fourier transform algorithm. Simulation and experimental results are presented to demonstrate the validity of the proposed method.

Authors:
; ; ; ;
Publication Date:
OSTI Identifier:
22036627
Resource Type:
Journal Article
Journal Name:
Applied Optics
Additional Journal Information:
Journal Volume: 50; Journal Issue: 15; Other Information: (c) 2011 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6935
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ALGORITHMS; CAMERAS; CHARGE-COUPLED DEVICES; FOURIER TRANSFORMATION; INTERFEROMETRY; LIGHT SCATTERING; MICROSTRUCTURE; SIMULATION; SURFACES; VISIBLE RADIATION

Citation Formats

Suodong, Ma, Chenggen, Quan, Rihong, Zhu, Tay, Cho Jui, and Lei, Chen. Surface profile measurement in white-light scanning interferometry using a three-chip color CCD. United States: N. p., 2011. Web. doi:10.1364/AO.50.002246.
Suodong, Ma, Chenggen, Quan, Rihong, Zhu, Tay, Cho Jui, & Lei, Chen. Surface profile measurement in white-light scanning interferometry using a three-chip color CCD. United States. https://doi.org/10.1364/AO.50.002246
Suodong, Ma, Chenggen, Quan, Rihong, Zhu, Tay, Cho Jui, and Lei, Chen. 2011. "Surface profile measurement in white-light scanning interferometry using a three-chip color CCD". United States. https://doi.org/10.1364/AO.50.002246.
@article{osti_22036627,
title = {Surface profile measurement in white-light scanning interferometry using a three-chip color CCD},
author = {Suodong, Ma and Chenggen, Quan and Rihong, Zhu and Tay, Cho Jui and Lei, Chen},
abstractNote = {White-light scanning interferometry (WLSI) is a useful technique to measure surface profile when a test object contains discontinuous structures or microstructures. A black and white CCD camera is usually utilized to capture interferograms, and a series of corresponding algorithms is used to achieve the profile measurement. However, the color information in the interferograms is lost. A novel profile measurement method that uses phase information in different color channels (red-green-blue) of an interferogram obtained using a three-chip color CCD in WLSI is proposed. The phase values are extracted by a windowed Fourier transform algorithm. Simulation and experimental results are presented to demonstrate the validity of the proposed method.},
doi = {10.1364/AO.50.002246},
url = {https://www.osti.gov/biblio/22036627}, journal = {Applied Optics},
issn = {0003-6935},
number = 15,
volume = 50,
place = {United States},
year = {Fri May 20 00:00:00 EDT 2011},
month = {Fri May 20 00:00:00 EDT 2011}
}