Diffractive simultaneous bidirectional shearing interferometry using tailored spatially coherent light
Measurements of wavefront deformations can be carried out with the help of lateral shearing interferometers. Here the focus is on a setup providing two shears along orthogonal directions simultaneously to generate the data needed for a reconstruction. We describe a diffractive solution using Ronchi phase gratings with a suppressed zeroth order for both the doubling of the wavefront under test and the bidirectional shearing unit. A series arrangement of the gratings offers an on-axis geometry, which minimizes the systematic errors of the test. For illumination, an extended incoherent monochromatic light source is used. High-contrast fringes can be obtained by tailoring the degree of coherence via a periodic intensity distribution.
- OSTI ID:
- 22036575
- Journal Information:
- Applied Optics, Vol. 50, Issue 4; Other Information: (c) 2011 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6935
- Country of Publication:
- United States
- Language:
- English
Similar Records
Analysis of systematic errors in lateral shearing interferometry for EUV optical testing
Development of compact extreme ultraviolet interferometry for on-line test of lithography cameras