Integrated microinterferometric sensor for in-plane displacement measurement

Journal Article · Wed Nov 10 00:00:00 EST 2010 · Applied Optics

DOI:https://doi.org/10.1364/AO.49.006243· OSTI ID:22036552

Krezel, Jerzy; Kujawinska, Malgorzata; Mohr, Juergen; Guttmann, Markus; Wissmann, Markus; Tonchev, Svetlen; Parriaux, Olivier

We present an integrated sensor based on a grating interferometer (GI) for in-plane displacement measurement in microregions of large engineering structures. The system concept and design, based on a monolithic version of Czarnek's GI, is discussed in detail. The technology chain of the GI measurement head (MH), including the master fabrication and further replication by means of hot embossing, is described. The numerical analyses of the MH by means of geometric ray tracing and scalar wave propagation are provided. They allow us to determine geometrical tolerance values as well as refractive index homogeneity and nonflatness of MH working surfaces, which provide proper beam guiding. Finally the demonstrative measurement performed with a model of the sensor is presented.

• OSTI ID: 22036552
• Journal Information: Applied Optics, Vol. 49, Issue 32; Other Information: (c) 2010 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6935
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BEAMS
FABRICATION
INTERFEROMETERS
NUMERICAL ANALYSIS
REFRACTIVE INDEX
SENSORS
SURFACES
TOLERANCE
WAVE PROPAGATION