Effect of helium on spatial plasma parameters in low pressure argon-helium plasma

Journal Article · Mon Apr 16 00:00:00 EDT 2012 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3703608· OSTI ID:22025526

Bang, Jin-Young; Han, Duksun; Cho, Sung-Won; Chung, Chin-Wook ^[1]

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1. Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791 (Korea, Republic of)

Spatial distributions of the electron energy probability function were measured using a Langmuir probe in side-type argon-helium inductively coupled plasma. Collisional dominated electron heating and a concave shape of plasma density profile were observed at 10 mTorr pure argon. As the helium proportion increased, the electron heating and density profile changed to collisionless dominated heating and a convex shape respectively, and the same tendency was shown when the pressure decreased in the pure argon plasma. These changes were due to the decrease in the e-n collision frequency and the expansion of the electron power dissipation region.

• OSTI ID: 22025526
• Journal Information: Applied Physics Letters, Vol. 100, Issue 16; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
ELECTRONS
HELIUM
LANGMUIR PROBE
PLASMA
PLASMA DENSITY
PLASMA DIAGNOSTICS
PLASMA EXPANSION
PLASMA HEATING
PLASMA PRESSURE
PROBABILITY
SPATIAL DISTRIBUTION