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Title: Identification of a paramagnetic recombination center in silicon/silicon-dioxide interface

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.3702785· OSTI ID:22025513
; ;  [1]; ;  [2]
  1. School of Fundamental Science and Technology, Keio University, Yokohama 223-8522 (Japan)
  2. A. F. Ioffe Physico-Technical Institute, 194021 St. Petersburg (Russian Federation)

A paramagnetic recombination center having an orthorhombic symmetry with g[110] = 2.0095(2), g[001] = 2.0038(2), and g[110] = 2.0029(2) is found at the interface between silicon and native oxide. The center is referred to P{sub m} center and observed by a spin dependent recombination based electron paramagnetic resonance detection that has the sensitivity of {approx}10{sup 11} spins/cm{sup 2}. The employment of an isotopically enriched {sup 28}Si sample with the concentration of {sup 29}Si nuclear spins reduced to 0.017% leads to narrowing of the resonance line. This narrowing is the key for the accurate determination of the angular dependence of the g-factor.

OSTI ID:
22025513
Journal Information:
Applied Physics Letters, Vol. 100, Issue 15; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English

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