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Title: Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.3684242· OSTI ID:22025431
; ; ; ; ;  [1];  [2]; ;  [2];  [3];  [4]
  1. School of Physics, University College Dublin, Belfield, Dublin 4 (Ireland)
  2. Department of Advanced Interdisciplinary Sciences, Center for Optical Research and Education (CORE), and Optical Technology Innovation Center (OpTIC), Utsunomiya University, Yoto 7-1-2, Utsunomiya, Tochigi 321-8585 (Japan)
  3. Department of Electrical Engineering, Nagaoka University of Technology, Kami-tomiokamachi 1603-1, Nagaoka, Niigata 940-2188 (Japan)
  4. Research Institute for Science and Engineering, Waseda University, Okubo 3-4-1, Shinjuku, Tokyo 169-8555 (Japan)

We have demonstrated an efficient extreme ultraviolet (EUV) source at 6.7 nm by irradiating Gd targets with 0.8 and 1.06 {mu}m laser pulses of 140 fs to 10 ns duration. Maximum conversion efficiency of 0.4% was observed within a 0.6% bandwidth. A Faraday cup observed ion yield and time of flight signals for ions from plasmas generated by each laser. Ion kinetic energy was lower for shorter pulse durations, which yielded higher electron temperatures required for efficient EUV emission, due to higher laser intensity. Picosecond laser pulses were found to be the best suited to 6.7 nm EUV source generation.

OSTI ID:
22025431
Journal Information:
Applied Physics Letters, Vol. 100, Issue 6; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English