Extraction of low-energy negative oxygen ions for thin film formation

Journal Article · Mon Sep 26 00:00:00 EDT 2011 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3637442· OSTI ID:21611718

Vasquez, M Jr; Sasaki, D; Kasuya, T; Wada, M ^[1]; Maeno, S ^[2]

---

1. Graduate School of Engineering, Doshisha University, Kyotanabe, Kyoto 610-0321 (Japan)
2. Novelion Systems Co. Ltd., Kyotanabe, Kyoto 610-0332 (Japan)

Coextraction of low-energy positive and negative ions were performed using a plasma sputter-type ion source system driven by a 13.56 MHz radio frequency (rf) power. Titanium (Ti) atoms were sputtered out from a target and the sputtered neutrals were postionized in oxygen/argon (O{sub 2}/Ar) plasma prior to extraction. The negative O ions were surface-produced and self-extracted. Mass spectral analyses of the extracted ion beams revealed the dependence of the ion current on the incident rf power, induced target bias and O{sub 2}/Ar partial pressure ratio. Ti{sup +} current was found to be dependent on Ar{sup +} current and reached a saturation value with increasing O{sub 2} partial pressure while the O{sup -} current showed a peak current at around 1:9 O{sub 2}/Ar partial pressure ratio. Ti{sup +} current was several orders of magnitude higher than that of the O{sup -} current.

• OSTI ID: 21611718
• Journal Information: AIP Conference Proceedings, Vol. 1390, Issue 1; Conference: 2. international symposium on negative ions, beams and sources, Takayama City (Japan), 16-19 Nov 2010; Other Information: DOI: 10.1063/1.3637442; (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
43 PARTICLE ACCELERATORS
ANIONS
ARGON IONS
BEAM EXTRACTION
ENERGY BEAM DEPOSITION
ION BEAMS
ION SOURCES
MAGNETIZATION
MHZ RANGE
OXYGEN IONS
PARTIAL PRESSURE
PLASMA
PLASMA BEAM INJECTION
SPUTTERING
THIN FILMS
TITANIUM
TITANIUM IONS
BEAM INJECTION
BEAMS
CHARGED PARTICLES
DEPOSITION
ELEMENTS
FILMS
FREQUENCY RANGE
IONS
METALS
PHYSICAL PROPERTIES
SURFACE COATING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENTS