Development of an Adaptive Optical System for Sub-10-nm Focusing of Synchrotron Radiation Hard X-rays
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
- SPring-8/JASRI, 1-1-1 Koto Sayo, Hyogo 679-5148 (Japan)
- SPring-8/RIKEN, 1-1-1 Koto Sayo, Hyogo 679-5148 (Japan)
In the hard x-ray region, to obtain the theoretical resolution or diffraction-limited focusing size in an imaging optical system, both ultraprecise optics and highly accurate alignment are necessary. An adaptive optical system is used for the compensation of aberrations in various optical systems, such as optical microscopes and space telescopes. In situ wavefront control of hard x-rays is also effective for realizing ideal performance. The aim of this paper is to develop an adaptive optical system for sub-10-nm hard x-ray focusing. The adaptive optical system performs the wavefront measurement using a phase retrieval algorithm and wavefront control using grazing-incidence deformable mirrors. Several results of experiments using the developed system are reported.
- OSTI ID:
- 21608271
- Journal Information:
- AIP Conference Proceedings, Vol. 1365, Issue 1; Conference: 10. international conference on X-ray microscopy, Chicago, IL (United States), 15-20 Aug 2010; Other Information: DOI: 10.1063/1.3625294; (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ALGORITHMS
ALIGNMENT
BEAM OPTICS
CONTROL
DIFFRACTION
FOCUSING
HARD X RADIATION
MIRRORS
OPTICAL SYSTEMS
PERFORMANCE
RESOLUTION
SYNCHROTRON RADIATION
BREMSSTRAHLUNG
COHERENT SCATTERING
ELECTROMAGNETIC RADIATION
IONIZING RADIATIONS
MATHEMATICAL LOGIC
RADIATIONS
SCATTERING
X RADIATION