Nanofabrication of Optical Elements for SXR and EUV Applications: Ion Beam Lithography as a New Approach

Journal Article · Fri Sep 09 00:00:00 EDT 2011 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3625315· OSTI ID:21608266

Lenz, J ^[1]; Krupp, N; Irsen, S ^[2]; Wilhein, T ^[1]

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1. Institute for X-Optics, RheinAhrCampus Remagen, University of Applied Sciences Koblenz, Suedallee 2, 53424 Remagen (Germany)
2. Research Group Electron Microscopy and Analytics, caesar Research Center, Ludwig-Erhard-Allee 2, 53175 Bonn (Germany)

Diffractive optical elements are important components for applications in soft x-ray and extreme ultraviolet radiation. At present, the standard fabrication method for such optics is based on electron beam lithography followed by nanostructuring. This requires a series of complex processes including exposure, reactive ion-etching, and electro-plating. We report on experiments showing the single-step fabrication of such elements using ion beam lithography. Both transmission and reflection gratings were fabricated and successfully implemented as spectrometers at laboratory soft x-ray sources. Additionally, first steps toward zone plate fabrication are described.

• OSTI ID: 21608266
• Journal Information: AIP Conference Proceedings, Vol. 1365, Issue 1; Conference: 10. international conference on X-ray microscopy, Chicago, IL (United States), 15-20 Aug 2010; Other Information: DOI: 10.1063/1.3625315; (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY
DIFFRACTION GRATINGS
ELECTRON BEAMS
ELECTROPLATING
ETCHING
EXTREME ULTRAVIOLET RADIATION
FABRICATION
ION BEAMS
NANOSTRUCTURES
PLATES
SOFT X RADIATION
X-RAY DIFFRACTION
X-RAY SPECTROMETERS
BEAMS
COHERENT SCATTERING
DEPOSITION
DIFFRACTION
ELECTRODEPOSITION
ELECTROLYSIS
ELECTROMAGNETIC RADIATION
IONIZING RADIATIONS
LEPTON BEAMS
LYSIS
MEASURING INSTRUMENTS
PARTICLE BEAMS
PLATING
RADIATIONS
SCATTERING
SPECTROMETERS
SURFACE COATING
SURFACE FINISHING
ULTRAVIOLET RADIATION
X RADIATION