Effect of different chemical treatments of surface on the height of Al-p-SiGe and Au-n-SiGe barriers
- Academy of Sciences of Uzbekistan, Starodubtsev Physicotechnical Institute (Uzbekistan)
The effect of different chemical treatments on the properties of Au-n-SiGe and Al-p-SiGe Schottky barriers has been investigated. Etching under different conditions was used to prepare surfaces with different densities of surface states (D{sub ss}). It is shown that the barrier height in the structures under study correlates with the D{sub ss} value and germanium content in the Si{sub 1-x}Ge{sub x} alloy.
- OSTI ID:
- 21562302
- Journal Information:
- Semiconductors, Vol. 44, Issue 5; Other Information: DOI: 10.1134/S1063782610050106; Copyright (c) 2010 Pleiades Publishing, Ltd.; ISSN 1063-7826
- Country of Publication:
- United States
- Language:
- English
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