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Title: Photoactivation of the processes of formation of nanostructures by local anodic oxidation of a titanium film

Abstract

Experimental results on the conditions of activation of probe nanolithography of a thin titanium film by means of local anodic oxidation are reported. It is established that ultraviolet stimulation reduces the geometric dimensions of nanometric oxide structures. The stimulation is accompanied by an increase in the amplitude and duration of the threshold voltage pulse, correspondingly, from 6 to 7 V and from 50 to 100 ms at the relative humidity 50%. The experimental data on the effect of the cantilever coating material and substrate temperature on the geometric dimensions of nanometric oxide structures are reported.

Authors:
; ; ;  [1]
  1. Southern Federal University, Taganrog Institute of Technology (Russian Federation)
Publication Date:
OSTI Identifier:
21562159
Resource Type:
Journal Article
Journal Name:
Semiconductors
Additional Journal Information:
Journal Volume: 44; Journal Issue: 13; Other Information: DOI: 10.1134/S1063782610130178; Copyright (c) 2010 Pleiades Publishing, Ltd.; Journal ID: ISSN 1063-7826
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; AMPLITUDES; ELECTRIC POTENTIAL; FILMS; HUMIDITY; NANOSTRUCTURES; OXIDATION; OXIDES; PROBES; PULSES; STIMULATION; SUBSTRATES; TITANIUM; ULTRAVIOLET RADIATION; CHALCOGENIDES; CHEMICAL REACTIONS; ELECTROMAGNETIC RADIATION; ELEMENTS; METALS; MOISTURE; OXYGEN COMPOUNDS; RADIATIONS; TRANSITION ELEMENTS

Citation Formats

Ageev, O A, Alyab'eva, N I, Konoplev, B. G., E-mail: kbg@tsure.ru, Polyakov, V V, and Smirnov, V A. Photoactivation of the processes of formation of nanostructures by local anodic oxidation of a titanium film. United States: N. p., 2010. Web. doi:10.1134/S1063782610130178.
Ageev, O A, Alyab'eva, N I, Konoplev, B. G., E-mail: kbg@tsure.ru, Polyakov, V V, & Smirnov, V A. Photoactivation of the processes of formation of nanostructures by local anodic oxidation of a titanium film. United States. https://doi.org/10.1134/S1063782610130178
Ageev, O A, Alyab'eva, N I, Konoplev, B. G., E-mail: kbg@tsure.ru, Polyakov, V V, and Smirnov, V A. 2010. "Photoactivation of the processes of formation of nanostructures by local anodic oxidation of a titanium film". United States. https://doi.org/10.1134/S1063782610130178.
@article{osti_21562159,
title = {Photoactivation of the processes of formation of nanostructures by local anodic oxidation of a titanium film},
author = {Ageev, O A and Alyab'eva, N I and Konoplev, B. G., E-mail: kbg@tsure.ru and Polyakov, V V and Smirnov, V A},
abstractNote = {Experimental results on the conditions of activation of probe nanolithography of a thin titanium film by means of local anodic oxidation are reported. It is established that ultraviolet stimulation reduces the geometric dimensions of nanometric oxide structures. The stimulation is accompanied by an increase in the amplitude and duration of the threshold voltage pulse, correspondingly, from 6 to 7 V and from 50 to 100 ms at the relative humidity 50%. The experimental data on the effect of the cantilever coating material and substrate temperature on the geometric dimensions of nanometric oxide structures are reported.},
doi = {10.1134/S1063782610130178},
url = {https://www.osti.gov/biblio/21562159}, journal = {Semiconductors},
issn = {1063-7826},
number = 13,
volume = 44,
place = {United States},
year = {Wed Dec 15 00:00:00 EST 2010},
month = {Wed Dec 15 00:00:00 EST 2010}
}