Self-consistent particle modeling of radio frequency discharge in Ar/O{sub 2} mixtures: Effects of crossed electric and magnetic fields and partial pressure
- University of Toulouse, UMR CNRS 5213, Laplace, Toulouse (France)
- Laboratoire Genie Electrique et Energie Renouvelables, Chlef University (Algeria)
A particle-in-cell/Monte Carlo model is developed to study and analyze the electrical characteristics of the nonequilibrium plasma created by radio frequency (RF) discharge in Ar/O{sub 2} mixtures in the presence of crossed electric and magnetic fields. The method of collision treatment is based on an optimized estimation of the free time flight. The needed basic data--more specifically, the ion-neutral cross sections--are determined first. The simulation conditions are 50 mTorr for the total gas pressure and 200 V for the peak of the RF voltage at a frequency of 13.56 MHz. The magnetic field is varied from 0 to 50 G. The effect of the partial pressure ratio of O{sub 2} in the mixture and the effect of the magnitude of the magnetic field are discussed. In particular, the results show an increase of the plasma density that is ten times higher in the presence of a magnetic field.
- OSTI ID:
- 21560166
- Journal Information:
- Journal of Applied Physics, Vol. 109, Issue 8; Other Information: DOI: 10.1063/1.3569708; (c) 2011 American Institute of Physics; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON
COLLISIONS
COMPUTERIZED SIMULATION
CROSS SECTIONS
HIGH-FREQUENCY DISCHARGES
IONS
MAGNETIC FIELDS
MIXTURES
MONTE CARLO METHOD
NON-EQUILIBRIUM PLASMA
OXYGEN
PARTIAL PRESSURE
PLASMA DENSITY
PLASMA SIMULATION
RADIOWAVE RADIATION
CALCULATION METHODS
CHARGED PARTICLES
DISPERSIONS
ELECTRIC DISCHARGES
ELECTROMAGNETIC RADIATION
ELEMENTS
FLUIDS
GASES
NONMETALS
PHYSICAL PROPERTIES
PLASMA
RADIATIONS
RARE GASES
SIMULATION
THERMODYNAMIC PROPERTIES