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Title: Change in the surface morphology and chemical composition of some oxide crystals under UV laser irradiation

Journal Article · · Quantum Electronics (Woodbury, N.Y.)

The effect of the 248-nm KrF and 355-nm YAG:Nd{sup 3+} laser radiation on the surface morphology and chemical composition of SrTiO{sub 3}, Sr{sub 2}RuO{sub 4}, PbMoO{sub 4}, LiNbO{sub 3}, Y{sub 3}Al{sub 5}O{sub 12}, and Al{sub 2}O{sub 3} crystals has been studied. A relationship between the laser energy density on the sample surface and the surface roughness caused by the irradiation is determined. A technique for determining exactly the geometric surface characteristics is proposed. The effect of the surface roughness on the results of energy-dispersive X-ray (EDX) microanalysis has been investigated. A method for correcting the EDX data for samples with a rough surface has been developed. It is shown that the small variation in the composition of PbMoO{sub 4}, LiNbO{sub 3}, Y{sub 3}Al{sub 5}O{sub 12}, and Al{sub 2}O{sub 3} samples after laser irradiation can be explained by the measurement error, related to the change in the surface roughness. At the same time, the irradiation of SrTiO{sub 3} and Sr{sub 2}RuO{sub 4} crystals by a YAG:Nd laser changes the chemical composition of their surface layers. (interaction of laser radiation with matter)

OSTI ID:
21552642
Journal Information:
Quantum Electronics (Woodbury, N.Y.), Vol. 41, Issue 7; Other Information: DOI: 10.1070/QE2011v041n07ABEH014420; ISSN 1063-7818
Country of Publication:
United States
Language:
English