Simulation of particle velocity in a laser-produced tin plasma extreme ultraviolet source

Journal Article · Wed Jun 15 00:00:00 EDT 2011 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3601346· OSTI ID:21538433

Masnavi, Majid; Nakajima, Mitsuo; Horioka, Kazuhiko ^[1]; Araghy, Homaira Parchamy ^[2]; Endo, Akira ^[3]

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1. Department of Energy Sciences, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8502 (Japan)
2. Plasma Physics Research Center, Azad University, Tehran (Iran, Islamic Republic of)
3. Friedrich-Schiller University, Institute of Applied Physics, Jena (Germany)

In connection with fast heating in a laser produced plasma (LPP) extreme ultraviolet (EUV) source, the superheating behavior of bulk tin (Sn) at high heating rates is investigated. A constant temperature and pressure molecular dynamics simulation using modified Lennard-Jones and Coulomb potentials suitable for studying the liquid structure of Sn is employed in order to derive the caloric curves of the solid and liquid phases. The results have shown transient effects on the phase transitions. Superheating is observed during the melting and vaporizing processes. The velocity distribution of Sn particles against typical laser fluence in a LPP EUV light source has been numerically investigated using a simplified method including a one-dimensional, two-temperature, molecular dynamics, and steady-state ionization model. In the framework of our model, it was found that ejected Sn particles have a maximum velocity on the order of 10 to 40 km/s in plasma created using a nanosecond pre-pulse neodymium-doped yttrium aluminum garnet (Nd:YAG, 1.06 {mu}m) laser in EUV lithography experiments.

• OSTI ID: 21538433
• Journal Information: Journal of Applied Physics, Vol. 109, Issue 12; Other Information: DOI: 10.1063/1.3601346; (c) 2011 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
COULOMB FIELD
DOPED MATERIALS
ELECTRIC POTENTIAL
ELECTRON TEMPERATURE
EXTREME ULTRAVIOLET RADIATION
HEATING RATE
ION TEMPERATURE
LASER-PRODUCED PLASMA
LENNARD-JONES POTENTIAL
LIQUID METALS
MELTING
MOLECULAR DYNAMICS METHOD
NEODYMIUM LASERS
PHASE TRANSFORMATIONS
PLASMA HEATING
SIMULATION
STEADY-STATE CONDITIONS
THERMODYNAMICS
TIN
CALCULATION METHODS
ELECTRIC FIELDS
ELECTROMAGNETIC RADIATION
ELEMENTS
FLUIDS
HEATING
LASERS
LIQUIDS
MATERIALS
METALS
PLASMA
POTENTIALS
RADIATIONS
SOLID STATE LASERS
ULTRAVIOLET RADIATION