Microstructural and dielectric properties of Ba{sub 0.6}Sr{sub 0.4}Ti{sub 1-x}Zr{sub x}O{sub 3} based combinatorial thin film capacitors library

Journal Article · Wed Dec 01 00:00:00 EST 2010 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3514153· OSTI ID:21537967

Guozhen, Liu; Wolfman, Jerome; Autret-Lambert, Cecile; Sakai, Joe; Roger, Sylvain; Gervais, Monique; Gervais, Francois ^[1]

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1. Laboratoire d'Electrodynamique des Materiaux Avances (LEMA), UMR 6157 CNRS/CEA, Universite Francois Rabelais, Parc de Grandmont, 37200 Tours (France)

Epitaxial growth of Ba{sub 0.6}Sr{sub 0.4}Ti{sub 1-x}Zr{sub x}O{sub 3} (0{<=}x{<=}0.3) composition spread thin film library on SrRuO{sub 3}/SrTiO{sub 3} layer by combinatorial pulsed laser deposition (PLD) is reported. X-ray diffraction and energy dispersive x-ray spectroscopy studies showed an accurate control of the film phase and composition by combinatorial PLD. A complex evolution of the microstructure and morphology with composition of the library is described, resulting from the interplay between epitaxial stress, increased chemical pressure, and reduced elastic energy upon Zr doping. Statistical and temperature-related capacitive measurements across the library showed unexpected variations in the dielectric properties. Doping windows with enhanced permittivity and tunability are identified, and correlated to microstructural properties.

• OSTI ID: 21537967
• Journal Information: Journal of Applied Physics, Vol. 108, Issue 11; Other Information: DOI: 10.1063/1.3514153; (c) 2010 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM COMPOUNDS
CAPACITORS
CRYSTAL STRUCTURE
ENERGY BEAM DEPOSITION
EPITAXY
LASER RADIATION
LAYERS
MICROSTRUCTURE
MINERAL INDUSTRY
PERMITTIVITY
PULSED IRRADIATION
RUTHENIUM COMPOUNDS
STRESSES
STRONTIUM COMPOUNDS
STRONTIUM TITANATES
THIN FILMS
X RADIATION
X-RAY DIFFRACTION
X-RAY SPECTROSCOPY
ZIRCONIUM COMPOUNDS
ALKALINE EARTH METAL COMPOUNDS
COHERENT SCATTERING
CRYSTAL GROWTH METHODS
DEPOSITION
DIELECTRIC PROPERTIES
DIFFRACTION
ELECTRICAL EQUIPMENT
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
EQUIPMENT
FILMS
INDUSTRY
IONIZING RADIATIONS
IRRADIATION
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIATIONS
REFRACTORY METAL COMPOUNDS
SCATTERING
SPECTROSCOPY
SURFACE COATING
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS