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Title: Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas

Abstract

The electron energy probability functions (EEPFs) were measured with increasing gas pressure in 60/13.56 MHz dual-frequency capacitively coupled plasma (DF-CCP) using compensated Langmiur electrostatic probe. The transition pressure of heating mode from collisionless to collisional heating in 60/13.56 MHz DF-CCP is found to be significantly lower than that in 13.56 MHz single-frequency CCP. As the pressure increases, the EEPFs change from bi-Maxwellian to Druyvesteyn type which is similar with that in 60 MHz single-frequency CCP. The pressure dependence of electron densities, effective electron temperatures, floating potentials, and plasma potentials in 60/13.56 MHz DF-CCP were measured and were compared with that in 60 MHz single-frequency CCP. The pressure dependence of these plasma parameters in 60/13.56 MHz DF-CCP is similar with that in 60 MHz single-frequency CCP.

Authors:
;  [1]; ;  [2]
  1. Key Laboratory of Atomic and Molecular Physics and Functional Materials of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070 (China)
  2. School of Physical Science and Technology, Suzhou University, SuZhou 215006 (China)
Publication Date:
OSTI Identifier:
21537832
Resource Type:
Journal Article
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 18; Journal Issue: 5; Other Information: DOI: 10.1063/1.3587108; (c) 2011 American Institute of Physics; Journal ID: ISSN 1070-664X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; COLLISIONAL HEATING; ELECTRON DENSITY; ELECTRON TEMPERATURE; ELECTROSTATIC PROBES; HIGH-FREQUENCY DISCHARGES; LANGMUIR PROBE; PLASMA POTENTIAL; PLASMA PRESSURE; PRESSURE DEPENDENCE; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; ELECTRIC PROBES; HEATING; HIGH-FREQUENCY HEATING; MAGNETIC-PUMPING HEATING; PLASMA HEATING; PROBES

Citation Formats

Yuan, Q H, Yin, G Q, Xin, Y, and Ning, Z Y. Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas. United States: N. p., 2011. Web. doi:10.1063/1.3587108.
Yuan, Q H, Yin, G Q, Xin, Y, & Ning, Z Y. Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas. United States. https://doi.org/10.1063/1.3587108
Yuan, Q H, Yin, G Q, Xin, Y, and Ning, Z Y. 2011. "Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas". United States. https://doi.org/10.1063/1.3587108.
@article{osti_21537832,
title = {Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas},
author = {Yuan, Q H and Yin, G Q and Xin, Y and Ning, Z Y},
abstractNote = {The electron energy probability functions (EEPFs) were measured with increasing gas pressure in 60/13.56 MHz dual-frequency capacitively coupled plasma (DF-CCP) using compensated Langmiur electrostatic probe. The transition pressure of heating mode from collisionless to collisional heating in 60/13.56 MHz DF-CCP is found to be significantly lower than that in 13.56 MHz single-frequency CCP. As the pressure increases, the EEPFs change from bi-Maxwellian to Druyvesteyn type which is similar with that in 60 MHz single-frequency CCP. The pressure dependence of electron densities, effective electron temperatures, floating potentials, and plasma potentials in 60/13.56 MHz DF-CCP were measured and were compared with that in 60 MHz single-frequency CCP. The pressure dependence of these plasma parameters in 60/13.56 MHz DF-CCP is similar with that in 60 MHz single-frequency CCP.},
doi = {10.1063/1.3587108},
url = {https://www.osti.gov/biblio/21537832}, journal = {Physics of Plasmas},
issn = {1070-664X},
number = 5,
volume = 18,
place = {United States},
year = {Sun May 15 00:00:00 EDT 2011},
month = {Sun May 15 00:00:00 EDT 2011}
}