Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas
Abstract
The electron energy probability functions (EEPFs) were measured with increasing gas pressure in 60/13.56 MHz dual-frequency capacitively coupled plasma (DF-CCP) using compensated Langmiur electrostatic probe. The transition pressure of heating mode from collisionless to collisional heating in 60/13.56 MHz DF-CCP is found to be significantly lower than that in 13.56 MHz single-frequency CCP. As the pressure increases, the EEPFs change from bi-Maxwellian to Druyvesteyn type which is similar with that in 60 MHz single-frequency CCP. The pressure dependence of electron densities, effective electron temperatures, floating potentials, and plasma potentials in 60/13.56 MHz DF-CCP were measured and were compared with that in 60 MHz single-frequency CCP. The pressure dependence of these plasma parameters in 60/13.56 MHz DF-CCP is similar with that in 60 MHz single-frequency CCP.
- Authors:
-
- Key Laboratory of Atomic and Molecular Physics and Functional Materials of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070 (China)
- School of Physical Science and Technology, Suzhou University, SuZhou 215006 (China)
- Publication Date:
- OSTI Identifier:
- 21537832
- Resource Type:
- Journal Article
- Journal Name:
- Physics of Plasmas
- Additional Journal Information:
- Journal Volume: 18; Journal Issue: 5; Other Information: DOI: 10.1063/1.3587108; (c) 2011 American Institute of Physics; Journal ID: ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; COLLISIONAL HEATING; ELECTRON DENSITY; ELECTRON TEMPERATURE; ELECTROSTATIC PROBES; HIGH-FREQUENCY DISCHARGES; LANGMUIR PROBE; PLASMA POTENTIAL; PLASMA PRESSURE; PRESSURE DEPENDENCE; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; ELECTRIC PROBES; HEATING; HIGH-FREQUENCY HEATING; MAGNETIC-PUMPING HEATING; PLASMA HEATING; PROBES
Citation Formats
Yuan, Q H, Yin, G Q, Xin, Y, and Ning, Z Y. Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas. United States: N. p., 2011.
Web. doi:10.1063/1.3587108.
Yuan, Q H, Yin, G Q, Xin, Y, & Ning, Z Y. Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas. United States. https://doi.org/10.1063/1.3587108
Yuan, Q H, Yin, G Q, Xin, Y, and Ning, Z Y. 2011.
"Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas". United States. https://doi.org/10.1063/1.3587108.
@article{osti_21537832,
title = {Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas},
author = {Yuan, Q H and Yin, G Q and Xin, Y and Ning, Z Y},
abstractNote = {The electron energy probability functions (EEPFs) were measured with increasing gas pressure in 60/13.56 MHz dual-frequency capacitively coupled plasma (DF-CCP) using compensated Langmiur electrostatic probe. The transition pressure of heating mode from collisionless to collisional heating in 60/13.56 MHz DF-CCP is found to be significantly lower than that in 13.56 MHz single-frequency CCP. As the pressure increases, the EEPFs change from bi-Maxwellian to Druyvesteyn type which is similar with that in 60 MHz single-frequency CCP. The pressure dependence of electron densities, effective electron temperatures, floating potentials, and plasma potentials in 60/13.56 MHz DF-CCP were measured and were compared with that in 60 MHz single-frequency CCP. The pressure dependence of these plasma parameters in 60/13.56 MHz DF-CCP is similar with that in 60 MHz single-frequency CCP.},
doi = {10.1063/1.3587108},
url = {https://www.osti.gov/biblio/21537832},
journal = {Physics of Plasmas},
issn = {1070-664X},
number = 5,
volume = 18,
place = {United States},
year = {Sun May 15 00:00:00 EDT 2011},
month = {Sun May 15 00:00:00 EDT 2011}
}