Frequency dependence of microparticle charge in a radio frequency discharge with Margenau electron velocity distribution
- Max Plank Institute for Extraterrestrial Physics, Garching 85741 (Germany)
rf discharges are widely used in complex plasma experiments. In this paper, we theoretically investigate the dependence of the particle floating potential on the discharge frequency, assuming the model Margenau expression for the electron velocity distribution function. In doing so we use the orbital motion limited cross section to calculate the electron flux to the particle and collision enhanced collection approximation for the ion flux to the particle. The floating potential is then obtained from the flux balance condition. It is shown that for typical plasma conditions in laboratory rf discharges, normalized floating potential grows with increase of the discharge frequency in collisionless regime and decreases in weakly collisional regime. However, variations in the floating potential are usually small when plasma parameters do not depend on the rf frequency.
- OSTI ID:
- 21532212
- Journal Information:
- Physics of Plasmas, Vol. 18, Issue 1; Other Information: DOI: 10.1063/1.3530439; (c) 2011 American Institute of Physics; ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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