High-performance metamorphic InGaAs resonant cavity enhanced photodetector grown on GaAs substrate

Journal Article · Mon May 16 00:00:00 EDT 2011 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3592569· OSTI ID:21518437

Liu, S Q; Han, Q; Zhu, B; Yang, X H; Wang, X; Wang, J; Wang, X P ^[1]; Ni, H Q; He, J F; Li, M F; Zhu, Y; Niu, Z C ^[2]

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1. State Key laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, P.O. Box 912, Beijing 100083 (China)
2. State Key laboratory for Superlattices and microstructures, Institute of Semiconductors, Chinese Academy of Sciences, P.O. Box 912, Beijing 100083 (China)

In this letter, we demonstrated a top illuminated 1.55 {mu}m metamorphic InGaAs resonant-cavity-enhanced p-i-n photodetector grown on GaAs substrate. The photodetectors were grown by a solid-source molecular beam epitaxy system. The high quality linearly graded In{sub x}Al{sub 0.4}Ga{sub 1-x-0.4}As metamorphic buffer layer enabled photodiodes to achieve ultralow dark current densities of 2.3x10{sup -6} A/cm{sup 2} at 0 V and 4.2x10{sup -5} A/cm{sup 2} at a reverse bias of 5 V. A high quantum efficiency of 84.4% at resonant wavelength of 1542 nm, a full width at half maximum about 14 nm, and a -3 dB bandwidth up to 13 GHz were also obtained.

• OSTI ID: 21518437
• Journal Information: Applied Physics Letters, Vol. 98, Issue 20; Other Information: DOI: 10.1063/1.3592569; (c) 2011 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BUFFERS
CAVITIES
CAVITY RESONATORS
CURRENT DENSITY
GALLIUM ARSENIDES
GHZ RANGE
INDIUM COMPOUNDS
LAYERS
MOLECULAR BEAM EPITAXY
PHOTODETECTORS
PHOTODIODES
QUANTUM EFFICIENCY
SEMICONDUCTOR MATERIALS
SOLIDS
SUBSTRATES
TERNARY ALLOY SYSTEMS
WAVELENGTHS
ALLOY SYSTEMS
ARSENIC COMPOUNDS
ARSENIDES
CRYSTAL GROWTH METHODS
EFFICIENCY
ELECTRONIC EQUIPMENT
EPITAXY
EQUIPMENT
FREQUENCY RANGE
GALLIUM COMPOUNDS
MATERIALS
PNICTIDES
RESONATORS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES