In situ probing of helium desorption from individual nanobubbles under electron irradiation

Journal Article · Mon Apr 25 00:00:00 EDT 2011 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3582612· OSTI ID:21518404

David, M -L; Pailloux, F; Mauchamp, V; Pizzagalli, L ^[1]

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1. Institut Pprime, UPR 3346 CNRS-Universite de Poitiers-ENSMA, SP2MI, 86962 Futuroscope-Chasseneuil cedex (France)

The understanding of the mechanisms of helium bubble formation and evolution in materials requires the quantitative determination of several key quantities such as the helium density in the bubbles. Helium nanobubbles of about 16 nm in diameter were created in silicon by helium implantation at high fluence and subsequent annealing. Individual nanobubbles were analyzed by spatially resolved Electron Energy-loss Spectroscopy (EELS). We report on the in situ probing of helium desorption from the nanobubbles under electron irradiation. This opens new perspectives for a more accurate determination of the helium density through spatially resolved EELS.

• OSTI ID: 21518404
• Journal Information: Applied Physics Letters, Vol. 98, Issue 17; Other Information: DOI: 10.1063/1.3582612; (c) 2011 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
77 NANOSCIENCE AND NANOTECHNOLOGY
ANNEALING
DENSITY
DESORPTION
ELECTRON BEAMS
ENERGY-LOSS SPECTROSCOPY
HELIUM
IRRADIATION
MATERIALS
NANOSTRUCTURES
SILICON
BEAMS
ELECTRON SPECTROSCOPY
ELEMENTS
FLUIDS
GASES
HEAT TREATMENTS
LEPTON BEAMS
NONMETALS
PARTICLE BEAMS
PHYSICAL PROPERTIES
RARE GASES
SEMIMETALS
SORPTION
SPECTROSCOPY