Enhanced optical constants of nanocrystalline yttrium oxide thin films

Journal Article · Mon Jan 17 00:00:00 EST 2011 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3524202· OSTI ID:21518252

Ramana, C V; Mudavakkat, V H; Bharathi, K Kamala ^[1]; Atuchin, V V; Pokrovsky, L D ^[2]; Kruchinin, V N ^[3]

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1. Department of Mechanical Engineering, University of Texas at El Paso, El Paso, Texas 79968 (United States)
2. Laboratory for Optical Materials and Structures, Institute of Semiconductor Physics, SB RAS, Novosibirsk 90 630090 (Russian Federation)
3. Laboratory for Ellipsometry of Semiconductor Materials and Structures, Institute of Semiconductor Physics, SB RAS, Novosibirsk 90 630090 (Russian Federation)

Yttrium oxide (Y{sub 2}O{sub 3}) films with an average crystallite-size (L) ranging from 5 to 40 nm were grown by sputter-deposition onto Si(100) substrates. The optical properties of grown Y{sub 2}O{sub 3} films were evaluated using spectroscopic ellipsometry measurements. The size-effects were significant on the optical constants and their dispersion profiles of Y{sub 2}O{sub 3} films. A significant enhancement in the index of refraction (n) is observed in well-defined Y{sub 2}O{sub 3} nanocrystalline films compared to that of amorphous Y{sub 2}O{sub 3}. A direct, linear L-n relationship found for Y{sub 2}O{sub 3} films suggests that tuning optical properties for desired applications can be achieved by controlling the size at the nanoscale dimensions.

• OSTI ID: 21518252
• Journal Information: Applied Physics Letters, Vol. 98, Issue 3; Other Information: DOI: 10.1063/1.3524202; (c) 2011 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY
CRYSTALS
DEPOSITION
DISPERSIONS
ELLIPSOMETRY
NANOSTRUCTURES
OPTICAL DISPERSION
OPTICAL PROPERTIES
REFRACTIVE INDEX
SPUTTERING
SUBSTRATES
THIN FILMS
TUNING
YTTRIUM OXIDES
CHALCOGENIDES
FILMS
MEASURING METHODS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS