Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources

Journal Article · Mon Dec 06 00:00:00 EST 2010 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3526383· OSTI ID:21518201

Otsuka, Takamitsu; Higashiguchi, Takeshi; Yugami, Noboru; Yatagai, Toyohiko ^[1]; Kilbane, Deirdre; Dunne, Padraig; O'Sullivan, Gerry ^[2]; Jiang, Weihua ^[3]; Endo, Akira ^[4]

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1. Department of Advanced Interdisciplinary Sciences and Center for Optical Research and Education (CORE), Utsunomiya University, Yoto 7-1-2, Utsunomiya, Tochigi 321-8585 (Japan)
2. School of Physics, University College Dublin, Belfield, Dublin 4 (Ireland)
3. Department of Electrical Engineering, Nagaoka University of Technology, Kami-tomiokamachi 1603-1, Nagaoka, Niigata 940-2188 Japan (Japan)
4. Forschungszentrum Dresden, Bautzner Landstrs. 400, Dresden D-01328 (Germany)

We have investigated the dependence of the spectral behavior and conversion efficiencies of rare-earth plasma extreme ultraviolet sources with peak emission at 6.7 nm on laser wavelength and the initial target density. The maximum conversion efficiency was 1.3% at a laser intensity of 1.6x10{sup 12} W/cm{sup 2} at an operating wavelength of 1064 nm, when self-absorption was reduced by use of a low initial density target. Moreover, the lower-density results in a narrower spectrum and therefore improved spectral purity. It is shown to be important to use a low initial density target and/or to produce low electron density plasmas for efficient extreme ultraviolet sources when using high-Z targets.

• OSTI ID: 21518201
• Journal Information: Applied Physics Letters, Vol. 97, Issue 23; Other Information: DOI: 10.1063/1.3526383; (c) 2010 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CONVERSION
DENSITY
EFFICIENCY
ELECTRON DENSITY
EMISSION
EXTREME ULTRAVIOLET RADIATION
GADOLINIUM
IMPURITIES
LASERS
LIGHT SOURCES
PEAKS
PLASMA
PLASMA DENSITY
PLASMA PRODUCTION
SELF-ABSORPTION
ULTRAVIOLET SPECTRA
WAVELENGTHS
ABSORPTION
ELECTROMAGNETIC RADIATION
ELEMENTS
METALS
PHYSICAL PROPERTIES
RADIATION SOURCES
RADIATIONS
RARE EARTHS
SORPTION
SPECTRA
ULTRAVIOLET RADIATION